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- W2092197364 abstract "Amorphous silicon carbide films were obtained by plasma enhanced chemical vapor deposition (PECVD) technique using a gas mixture of silane, methane, and hydrogen with a high excitation frequency and a high hydrogen dilution ratio. The high temperature annealing behavior of the amorphous silicon carbide films was studied by annealing at 1373 K for 1 h in nitrogen atmosphere. A very thin Au film was deposited on part of the films to investigate the metal induced crystallization effect. Well aligned nanotubes were found on the silicon carbide films covered by a thin gold layer after the high temperature annealing by atomic force microscopy. Further study is necessary to identify the nature of the nanotubes and elucidate their growth mechanism." @default.
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- W2092197364 date "2006-06-01" @default.
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- W2092197364 title "Characterization of nanocrystalline silicon carbide films" @default.
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- W2092197364 doi "https://doi.org/10.1016/j.jnoncrysol.2006.02.027" @default.
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