FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092287305> ?p ?o ?g. }

• W2092287305 endingPage "372" @default.
• W2092287305 startingPage "366" @default.
• W2092287305 abstract "Though germanium (Ge) shares many similar physical properties with silicon (Si), it also possesses unique characteristics that are complementary to those of Si. The advantages of Ge include its compatibility with Si microfabrication, its excellent gas and liquid phase etch selectivity to other materials commonly used in Si micromachining, and its low deposition temperature (<350/spl deg/C) that potentially allows Ge to be used after the completion of a standard CMOS run. Wider applications of Ge as a structural, sacrificial, and sensor material require a more systematic investigation of its processing and properties. The results of such an undertaking are presently reported. The topics covered are the formation of Ge thin films and novel application of the selective deposition of Ge to etch hole filling, characterization of the effects of thermal treatment on the evolution of the residual stress in Ge thin films, etch selectivity for etch mask and sacrificial layer applications, and gas phase release technique for stiction elimination." @default.
• W2092287305 created "2016-06-24" @default.
• W2092287305 creator A5011688144 @default.
• W2092287305 creator A5015449625 @default.
• W2092287305 creator A5028072841 @default.
• W2092287305 creator A5043677467 @default.
• W2092287305 creator A5061740418 @default.
• W2092287305 date "1999-01-01" @default.
• W2092287305 modified "2023-10-09" @default.
• W2092287305 title "Germanium as a versatile material for low-temperature micromachining" @default.
• W2092287305 cites W2008046536 @default.
• W2092287305 cites W2022110930 @default.
• W2092287305 cites W2032729511 @default.
• W2092287305 cites W2077857254 @default.
• W2092287305 cites W2084152575 @default.
• W2092287305 cites W2097383084 @default.
• W2092287305 cites W2115878033 @default.
• W2092287305 cites W2125837386 @default.
• W2092287305 cites W2137881108 @default.
• W2092287305 cites W2141822274 @default.
• W2092287305 cites W2143914153 @default.
• W2092287305 doi "https://doi.org/10.1109/84.809050" @default.
• W2092287305 hasPublicationYear "1999" @default.
• W2092287305 type Work @default.
• W2092287305 sameAs 2092287305 @default.
• W2092287305 citedByCount "35" @default.
• W2092287305 countsByYear W20922873052012 @default.
• W2092287305 countsByYear W20922873052013 @default.
• W2092287305 countsByYear W20922873052014 @default.
• W2092287305 countsByYear W20922873052015 @default.
• W2092287305 countsByYear W20922873052016 @default.
• W2092287305 countsByYear W20922873052017 @default.
• W2092287305 countsByYear W20922873052019 @default.
• W2092287305 countsByYear W20922873052020 @default.
• W2092287305 countsByYear W20922873052023 @default.
• W2092287305 crossrefType "journal-article" @default.
• W2092287305 hasAuthorship W2092287305A5011688144 @default.
• W2092287305 hasAuthorship W2092287305A5015449625 @default.
• W2092287305 hasAuthorship W2092287305A5028072841 @default.
• W2092287305 hasAuthorship W2092287305A5043677467 @default.
• W2092287305 hasAuthorship W2092287305A5061740418 @default.
• W2092287305 hasConcept C136525101 @default.
• W2092287305 hasConcept C142724271 @default.
• W2092287305 hasConcept C145667562 @default.
• W2092287305 hasConcept C151730666 @default.
• W2092287305 hasConcept C159985019 @default.
• W2092287305 hasConcept C171250308 @default.
• W2092287305 hasConcept C192562407 @default.
• W2092287305 hasConcept C204787440 @default.
• W2092287305 hasConcept C2779227376 @default.
• W2092287305 hasConcept C2779426163 @default.
• W2092287305 hasConcept C2816523 @default.
• W2092287305 hasConcept C37292000 @default.
• W2092287305 hasConcept C41075158 @default.
• W2092287305 hasConcept C49040817 @default.
• W2092287305 hasConcept C527607 @default.
• W2092287305 hasConcept C544956773 @default.
• W2092287305 hasConcept C550623735 @default.
• W2092287305 hasConcept C64297162 @default.
• W2092287305 hasConcept C71924100 @default.
• W2092287305 hasConcept C86803240 @default.
• W2092287305 hasConceptScore W2092287305C136525101 @default.
• W2092287305 hasConceptScore W2092287305C142724271 @default.
• W2092287305 hasConceptScore W2092287305C145667562 @default.
• W2092287305 hasConceptScore W2092287305C151730666 @default.
• W2092287305 hasConceptScore W2092287305C159985019 @default.
• W2092287305 hasConceptScore W2092287305C171250308 @default.
• W2092287305 hasConceptScore W2092287305C192562407 @default.
• W2092287305 hasConceptScore W2092287305C204787440 @default.
• W2092287305 hasConceptScore W2092287305C2779227376 @default.
• W2092287305 hasConceptScore W2092287305C2779426163 @default.
• W2092287305 hasConceptScore W2092287305C2816523 @default.
• W2092287305 hasConceptScore W2092287305C37292000 @default.
• W2092287305 hasConceptScore W2092287305C41075158 @default.
• W2092287305 hasConceptScore W2092287305C49040817 @default.
• W2092287305 hasConceptScore W2092287305C527607 @default.
• W2092287305 hasConceptScore W2092287305C544956773 @default.
• W2092287305 hasConceptScore W2092287305C550623735 @default.
• W2092287305 hasConceptScore W2092287305C64297162 @default.
• W2092287305 hasConceptScore W2092287305C71924100 @default.
• W2092287305 hasConceptScore W2092287305C86803240 @default.
• W2092287305 hasIssue "4" @default.
• W2092287305 hasLocation W20922873051 @default.
• W2092287305 hasOpenAccess W2092287305 @default.
• W2092287305 hasPrimaryLocation W20922873051 @default.
• W2092287305 hasRelatedWork W1658402459 @default.
• W2092287305 hasRelatedWork W1928570944 @default.
• W2092287305 hasRelatedWork W2004551270 @default.
• W2092287305 hasRelatedWork W2050746330 @default.
• W2092287305 hasRelatedWork W2075789632 @default.
• W2092287305 hasRelatedWork W2148672270 @default.
• W2092287305 hasRelatedWork W234153364 @default.
• W2092287305 hasRelatedWork W2411643189 @default.
• W2092287305 hasRelatedWork W2808901225 @default.
• W2092287305 hasRelatedWork W2098049438 @default.
• W2092287305 hasVolume "8" @default.
• W2092287305 isParatext "false" @default.
• W2092287305 isRetracted "false" @default.

• next