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- W2092291738 endingPage "1894" @default.
- W2092291738 startingPage "1892" @default.
- W2092291738 abstract "The impurity distributions in liquid-encapsulated Czochralski-grown GaAs were studied using secondary ion mass spectrometry along the diameter of circular wafers. Si and Al concentrations gradually decrease from the center to the edge of the wafer, while B has an inverse profile with respect to Si and Al. On the other hand, Cr concentration is almost constant across the wafer. To explain the impurity profiles across the wafer, we propose a model which shows that the nonuniform impurity distributions in the GaAs melt near the solid-liquid interface during crystal growth is due to the reducing reaction of the encapsulant B2O3." @default.
- W2092291738 created "2016-06-24" @default.
- W2092291738 creator A5009282384 @default.
- W2092291738 creator A5056714217 @default.
- W2092291738 date "1984-09-15" @default.
- W2092291738 modified "2023-09-25" @default.
- W2092291738 title "Secondary ion mass spectrometry analysis of impurity distributions across liquid-encapsulated Czochralski GaAs wafers" @default.
- W2092291738 cites W1972582820 @default.
- W2092291738 cites W1990712182 @default.
- W2092291738 doi "https://doi.org/10.1063/1.334174" @default.
- W2092291738 hasPublicationYear "1984" @default.
- W2092291738 type Work @default.
- W2092291738 sameAs 2092291738 @default.
- W2092291738 citedByCount "2" @default.
- W2092291738 crossrefType "journal-article" @default.
- W2092291738 hasAuthorship W2092291738A5009282384 @default.
- W2092291738 hasAuthorship W2092291738A5056714217 @default.
- W2092291738 hasConcept C113196181 @default.
- W2092291738 hasConcept C145148216 @default.
- W2092291738 hasConcept C160671074 @default.
- W2092291738 hasConcept C162356407 @default.
- W2092291738 hasConcept C178790620 @default.
- W2092291738 hasConcept C185592680 @default.
- W2092291738 hasConcept C192562407 @default.
- W2092291738 hasConcept C43617362 @default.
- W2092291738 hasConcept C49040817 @default.
- W2092291738 hasConcept C71987851 @default.
- W2092291738 hasConcept C77671233 @default.
- W2092291738 hasConceptScore W2092291738C113196181 @default.
- W2092291738 hasConceptScore W2092291738C145148216 @default.
- W2092291738 hasConceptScore W2092291738C160671074 @default.
- W2092291738 hasConceptScore W2092291738C162356407 @default.
- W2092291738 hasConceptScore W2092291738C178790620 @default.
- W2092291738 hasConceptScore W2092291738C185592680 @default.
- W2092291738 hasConceptScore W2092291738C192562407 @default.
- W2092291738 hasConceptScore W2092291738C43617362 @default.
- W2092291738 hasConceptScore W2092291738C49040817 @default.
- W2092291738 hasConceptScore W2092291738C71987851 @default.
- W2092291738 hasConceptScore W2092291738C77671233 @default.
- W2092291738 hasIssue "6" @default.
- W2092291738 hasLocation W20922917381 @default.
- W2092291738 hasOpenAccess W2092291738 @default.
- W2092291738 hasPrimaryLocation W20922917381 @default.
- W2092291738 hasRelatedWork W1972155913 @default.
- W2092291738 hasRelatedWork W1980670883 @default.
- W2092291738 hasRelatedWork W2026642978 @default.
- W2092291738 hasRelatedWork W2072804448 @default.
- W2092291738 hasRelatedWork W2092291738 @default.
- W2092291738 hasRelatedWork W2110211062 @default.
- W2092291738 hasRelatedWork W2151138508 @default.
- W2092291738 hasRelatedWork W2319404382 @default.
- W2092291738 hasRelatedWork W2526637554 @default.
- W2092291738 hasRelatedWork W2605626789 @default.
- W2092291738 hasVolume "56" @default.
- W2092291738 isParatext "false" @default.
- W2092291738 isRetracted "false" @default.
- W2092291738 magId "2092291738" @default.
- W2092291738 workType "article" @default.