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- W2092360241 abstract "We study surface kinetic roughening of TiN films grown on Si(100) substrates by dc reactive sputtering. The surface morphology of films deposited for different growth times under the same experimental conditions were analyzed by atomic force microscopy. The TiN films exhibit intrinsic anomalous scaling and multiscaling. The film kinetic roughening is characterized by a set of local exponent values ${ensuremath{alpha}}_{mathrm{loc}}=1.0$ and ${ensuremath{beta}}_{mathrm{loc}}=0.39$, and global exponent values $ensuremath{alpha}=1.7$ and $ensuremath{beta}=0.67$, with a coarsening exponent of $1∕z=0.39$. These properties are correlated to the local height-difference distribution function obeying power-law statistics. We associate this intrinsic anomalous scaling with the instability due to nonlocal shadowing effects that take place during thin-film growth by sputtering." @default.
- W2092360241 created "2016-06-24" @default.
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- W2092360241 date "2006-01-31" @default.
- W2092360241 modified "2023-10-13" @default.
- W2092360241 title "Intrinsic anomalous surface roughening of TiN films deposited by reactive sputtering" @default.
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- W2092360241 doi "https://doi.org/10.1103/physrevb.73.045436" @default.
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