FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092363310> ?p ?o ?g. }

• W2092363310 endingPage "4343" @default.
• W2092363310 startingPage "4339" @default.
• W2092363310 abstract "Zinc oxide (ZnO) thin films were deposited on unheated silicon substrates via radio frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin films was performed at 400 °C, 600 °C, 800 °C, and 1000 °C. The characteristics of the thin films were investigated by X-ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The films were then used to fabricate surface acoustic wave (SAW) resonators. The effects of post-annealing on the SAW devices are discussed in this work. Resulting in the 600 °C is determined as optimal annealing temperature for SAW devices. At 400 °C, the microvoids exit between the grains yield large root mean square (RMS) surface roughness and higher insertion losses in SAW devices. The highest RMS surface roughness, crack and residual stress cause a reduction of surface velocity (about 40 m/s) and increase dramatically insertion loss at 1000 °C. The SAW devices response becomes very weak at this temperature, the electromechanical coupling coefficient (k2) of ZnO film decrease from 3.8% at 600 °C to 1.49% at 1000 °C." @default.
• W2092363310 created "2016-06-24" @default.
• W2092363310 creator A5028577029 @default.
• W2092363310 creator A5037357723 @default.
• W2092363310 date "2011-02-01" @default.
• W2092363310 modified "2023-09-26" @default.
• W2092363310 title "The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering" @default.
• W2092363310 cites W1971084112 @default.
• W2092363310 cites W1972362419 @default.
• W2092363310 cites W1982520464 @default.
• W2092363310 cites W1985654049 @default.
• W2092363310 cites W1990175321 @default.
• W2092363310 cites W1997964909 @default.
• W2092363310 cites W2029783491 @default.
• W2092363310 cites W2036634154 @default.
• W2092363310 cites W2038249164 @default.
• W2092363310 cites W2060077813 @default.
• W2092363310 cites W2074064929 @default.
• W2092363310 cites W2080571236 @default.
• W2092363310 cites W2090238092 @default.
• W2092363310 cites W2093404110 @default.
• W2092363310 cites W2095520514 @default.
• W2092363310 cites W2117007911 @default.
• W2092363310 cites W2141186037 @default.
• W2092363310 cites W3003193740 @default.
• W2092363310 doi "https://doi.org/10.1016/j.apsusc.2010.12.053" @default.
• W2092363310 hasPublicationYear "2011" @default.
• W2092363310 type Work @default.
• W2092363310 sameAs 2092363310 @default.
• W2092363310 citedByCount "44" @default.
• W2092363310 countsByYear W20923633102012 @default.
• W2092363310 countsByYear W20923633102013 @default.
• W2092363310 countsByYear W20923633102014 @default.
• W2092363310 countsByYear W20923633102015 @default.
• W2092363310 countsByYear W20923633102016 @default.
• W2092363310 countsByYear W20923633102017 @default.
• W2092363310 countsByYear W20923633102018 @default.
• W2092363310 countsByYear W20923633102019 @default.
• W2092363310 countsByYear W20923633102021 @default.
• W2092363310 crossrefType "journal-article" @default.
• W2092363310 hasAuthorship W2092363310A5028577029 @default.
• W2092363310 hasAuthorship W2092363310A5037357723 @default.
• W2092363310 hasConcept C107365816 @default.
• W2092363310 hasConcept C113196181 @default.
• W2092363310 hasConcept C119599485 @default.
• W2092363310 hasConcept C120665830 @default.
• W2092363310 hasConcept C121332964 @default.
• W2092363310 hasConcept C123408415 @default.
• W2092363310 hasConcept C127413603 @default.
• W2092363310 hasConcept C159985019 @default.
• W2092363310 hasConcept C162954803 @default.
• W2092363310 hasConcept C171250308 @default.
• W2092363310 hasConcept C185592680 @default.
• W2092363310 hasConcept C19067145 @default.
• W2092363310 hasConcept C192562407 @default.
• W2092363310 hasConcept C22423302 @default.
• W2092363310 hasConcept C26771246 @default.
• W2092363310 hasConcept C2777855556 @default.
• W2092363310 hasConcept C37292000 @default.
• W2092363310 hasConcept C43617362 @default.
• W2092363310 hasConcept C49040817 @default.
• W2092363310 hasConcept C61427134 @default.
• W2092363310 hasConcept C71039073 @default.
• W2092363310 hasConcept C71907059 @default.
• W2092363310 hasConceptScore W2092363310C107365816 @default.
• W2092363310 hasConceptScore W2092363310C113196181 @default.
• W2092363310 hasConceptScore W2092363310C119599485 @default.
• W2092363310 hasConceptScore W2092363310C120665830 @default.
• W2092363310 hasConceptScore W2092363310C121332964 @default.
• W2092363310 hasConceptScore W2092363310C123408415 @default.
• W2092363310 hasConceptScore W2092363310C127413603 @default.
• W2092363310 hasConceptScore W2092363310C159985019 @default.
• W2092363310 hasConceptScore W2092363310C162954803 @default.
• W2092363310 hasConceptScore W2092363310C171250308 @default.
• W2092363310 hasConceptScore W2092363310C185592680 @default.
• W2092363310 hasConceptScore W2092363310C19067145 @default.
• W2092363310 hasConceptScore W2092363310C192562407 @default.
• W2092363310 hasConceptScore W2092363310C22423302 @default.
• W2092363310 hasConceptScore W2092363310C26771246 @default.
• W2092363310 hasConceptScore W2092363310C2777855556 @default.
• W2092363310 hasConceptScore W2092363310C37292000 @default.
• W2092363310 hasConceptScore W2092363310C43617362 @default.
• W2092363310 hasConceptScore W2092363310C49040817 @default.
• W2092363310 hasConceptScore W2092363310C61427134 @default.
• W2092363310 hasConceptScore W2092363310C71039073 @default.
• W2092363310 hasConceptScore W2092363310C71907059 @default.
• W2092363310 hasIssue "9" @default.
• W2092363310 hasLocation W20923633101 @default.
• W2092363310 hasOpenAccess W2092363310 @default.
• W2092363310 hasPrimaryLocation W20923633101 @default.
• W2092363310 hasRelatedWork W1968373997 @default.
• W2092363310 hasRelatedWork W1975623921 @default.
• W2092363310 hasRelatedWork W2004363215 @default.
• W2092363310 hasRelatedWork W2023571262 @default.
• W2092363310 hasRelatedWork W2038485546 @default.
• W2092363310 hasRelatedWork W2039903284 @default.
• W2092363310 hasRelatedWork W218405562 @default.
• W2092363310 hasRelatedWork W2355420186 @default.

• next