Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092425145> ?p ?o ?g. }
- W2092425145 endingPage "796" @default.
- W2092425145 startingPage "792" @default.
- W2092425145 abstract "The density of neutral oxygen atoms was determined in a plasma reactor for surface functionalization of polymer materials. Plasma was created in a stainless steel chamber by capacitively coupled RF generator at 13.56 MHz and adjustable forward power up to 100 W. Measurements were performed with a classical nickel catalytic probe. Systematic measurements were performed at a constant pumping speed, different flow rates from 15 to 100 sccm corresponding to pressures between 30 and 110 Pa, different powers between 40 and 100 W and different probe positions in the discharge chamber. The results showed that the O atom density did not depend much on probe position as long as it was between the powered electrode and grounded housing facing the electrode. The O density depended rather linearly with power at fixed pressure. At low power, the O density did not depend much on pressure, but at high power, it was increasing with increasing pressure. The O density was of the order of 1019 m−3 and increased slightly over 1020 m−3 at the highest power and pressure. The results were explained by gas phase and surface reactions." @default.
- W2092425145 created "2016-06-24" @default.
- W2092425145 creator A5026861642 @default.
- W2092425145 creator A5028549269 @default.
- W2092425145 creator A5064107318 @default.
- W2092425145 creator A5082489488 @default.
- W2092425145 date "2009-01-01" @default.
- W2092425145 modified "2023-10-16" @default.
- W2092425145 title "Oxygen atom density in capacitively coupled RF oxygen plasma" @default.
- W2092425145 cites W1702042975 @default.
- W2092425145 cites W1796241072 @default.
- W2092425145 cites W185687859 @default.
- W2092425145 cites W1963998024 @default.
- W2092425145 cites W1969354445 @default.
- W2092425145 cites W1970818730 @default.
- W2092425145 cites W1973195917 @default.
- W2092425145 cites W1973286693 @default.
- W2092425145 cites W1974393773 @default.
- W2092425145 cites W1983910303 @default.
- W2092425145 cites W1984214996 @default.
- W2092425145 cites W1986342576 @default.
- W2092425145 cites W1986886172 @default.
- W2092425145 cites W1991634715 @default.
- W2092425145 cites W1992095170 @default.
- W2092425145 cites W1998789369 @default.
- W2092425145 cites W2001176679 @default.
- W2092425145 cites W2001334691 @default.
- W2092425145 cites W2003364491 @default.
- W2092425145 cites W2011220262 @default.
- W2092425145 cites W2011385235 @default.
- W2092425145 cites W2012842337 @default.
- W2092425145 cites W2015616385 @default.
- W2092425145 cites W2018834786 @default.
- W2092425145 cites W2022060062 @default.
- W2092425145 cites W2022143059 @default.
- W2092425145 cites W2023569102 @default.
- W2092425145 cites W2024578513 @default.
- W2092425145 cites W2025338830 @default.
- W2092425145 cites W2026766370 @default.
- W2092425145 cites W2026865395 @default.
- W2092425145 cites W2035096228 @default.
- W2092425145 cites W2041985126 @default.
- W2092425145 cites W2043251404 @default.
- W2092425145 cites W2055804240 @default.
- W2092425145 cites W2057270726 @default.
- W2092425145 cites W2061950937 @default.
- W2092425145 cites W2063914326 @default.
- W2092425145 cites W2069598685 @default.
- W2092425145 cites W2070921604 @default.
- W2092425145 cites W2073445730 @default.
- W2092425145 cites W2074480727 @default.
- W2092425145 cites W2077763793 @default.
- W2092425145 cites W2079458158 @default.
- W2092425145 cites W2081380029 @default.
- W2092425145 cites W2090549807 @default.
- W2092425145 cites W2092060129 @default.
- W2092425145 cites W2098123196 @default.
- W2092425145 cites W2101472573 @default.
- W2092425145 cites W2139159464 @default.
- W2092425145 cites W2147525728 @default.
- W2092425145 cites W2153553923 @default.
- W2092425145 cites W2153880565 @default.
- W2092425145 cites W2156142183 @default.
- W2092425145 cites W2158348821 @default.
- W2092425145 cites W2163053102 @default.
- W2092425145 doi "https://doi.org/10.1016/j.vacuum.2008.07.008" @default.
- W2092425145 hasPublicationYear "2009" @default.
- W2092425145 type Work @default.
- W2092425145 sameAs 2092425145 @default.
- W2092425145 citedByCount "15" @default.
- W2092425145 countsByYear W20924251452012 @default.
- W2092425145 countsByYear W20924251452013 @default.
- W2092425145 countsByYear W20924251452016 @default.
- W2092425145 countsByYear W20924251452017 @default.
- W2092425145 crossrefType "journal-article" @default.
- W2092425145 hasAuthorship W2092425145A5026861642 @default.
- W2092425145 hasAuthorship W2092425145A5028549269 @default.
- W2092425145 hasAuthorship W2092425145A5064107318 @default.
- W2092425145 hasAuthorship W2092425145A5082489488 @default.
- W2092425145 hasConcept C113196181 @default.
- W2092425145 hasConcept C121332964 @default.
- W2092425145 hasConcept C147789679 @default.
- W2092425145 hasConcept C149635348 @default.
- W2092425145 hasConcept C163258240 @default.
- W2092425145 hasConcept C17525397 @default.
- W2092425145 hasConcept C178790620 @default.
- W2092425145 hasConcept C184779094 @default.
- W2092425145 hasConcept C185592680 @default.
- W2092425145 hasConcept C192562407 @default.
- W2092425145 hasConcept C194257627 @default.
- W2092425145 hasConcept C196054291 @default.
- W2092425145 hasConcept C21881925 @default.
- W2092425145 hasConcept C41008148 @default.
- W2092425145 hasConcept C43617362 @default.
- W2092425145 hasConcept C46362747 @default.
- W2092425145 hasConcept C49040817 @default.
- W2092425145 hasConcept C512968161 @default.
- W2092425145 hasConcept C540031477 @default.