Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092482689> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2092482689 abstract "Abstract The results of experimental and theoretical study of Cr–N films deposition by ion beam-assisted deposition (IBAD) are presented; the structure and electrical–physical properties of the initial stage of coating formation are studied. The experiments were carried out with ion energies of 15 and 30 keV and ion current density 25 μA/cm 2 . The residual gases effect on the film structure is investigated. It is found that oxygen atoms captured from chamber residual atmosphere induces the precipitate Cr 2 O 3 formation on the initial stage of deposition. The radiation-stimulated coalescence of such precipitates occurs in the irradiated films with the increase of condensate thickness. Formation of fine-grained Cr 2 N precipitates in the irradiated films is observed. The coating thickness for such precipitate formation depends on the ion beam energy. At energies 30 keV fine-grained p Cr 2 N recipitates are observed for a thickness higher than 70 nm. The performed computer simulation of IBAD demonstrated the good correspondence of calculated and experimental data. It allows to use the computer calculated data to predict the nitrogen distribution in condensed films." @default.
- W2092482689 created "2016-06-24" @default.
- W2092482689 creator A5003811522 @default.
- W2092482689 creator A5010994481 @default.
- W2092482689 creator A5011853851 @default.
- W2092482689 creator A5053438870 @default.
- W2092482689 date "2003-01-01" @default.
- W2092482689 modified "2023-10-14" @default.
- W2092482689 title "Production of Cr–N films by ion beam-assisted deposition technology: experiment and computer simulation" @default.
- W2092482689 cites W1969691602 @default.
- W2092482689 cites W1978667796 @default.
- W2092482689 cites W2024915445 @default.
- W2092482689 cites W2037553662 @default.
- W2092482689 cites W2045573119 @default.
- W2092482689 cites W2046789716 @default.
- W2092482689 cites W2093685670 @default.
- W2092482689 doi "https://doi.org/10.1016/s0257-8972(02)00614-x" @default.
- W2092482689 hasPublicationYear "2003" @default.
- W2092482689 type Work @default.
- W2092482689 sameAs 2092482689 @default.
- W2092482689 citedByCount "12" @default.
- W2092482689 countsByYear W20924826892012 @default.
- W2092482689 countsByYear W20924826892014 @default.
- W2092482689 countsByYear W20924826892017 @default.
- W2092482689 countsByYear W20924826892018 @default.
- W2092482689 countsByYear W20924826892023 @default.
- W2092482689 crossrefType "journal-article" @default.
- W2092482689 hasAuthorship W2092482689A5003811522 @default.
- W2092482689 hasAuthorship W2092482689A5010994481 @default.
- W2092482689 hasAuthorship W2092482689A5011853851 @default.
- W2092482689 hasAuthorship W2092482689A5053438870 @default.
- W2092482689 hasConcept C111337013 @default.
- W2092482689 hasConcept C113196181 @default.
- W2092482689 hasConcept C121332964 @default.
- W2092482689 hasConcept C145148216 @default.
- W2092482689 hasConcept C149792144 @default.
- W2092482689 hasConcept C151730666 @default.
- W2092482689 hasConcept C159985019 @default.
- W2092482689 hasConcept C171250308 @default.
- W2092482689 hasConcept C178790620 @default.
- W2092482689 hasConcept C185544564 @default.
- W2092482689 hasConcept C185592680 @default.
- W2092482689 hasConcept C19067145 @default.
- W2092482689 hasConcept C192562407 @default.
- W2092482689 hasConcept C22423302 @default.
- W2092482689 hasConcept C2781448156 @default.
- W2092482689 hasConcept C2781463530 @default.
- W2092482689 hasConcept C2816523 @default.
- W2092482689 hasConcept C43617362 @default.
- W2092482689 hasConcept C50774322 @default.
- W2092482689 hasConcept C537208039 @default.
- W2092482689 hasConcept C64297162 @default.
- W2092482689 hasConcept C86803240 @default.
- W2092482689 hasConcept C87355193 @default.
- W2092482689 hasConcept C93106096 @default.
- W2092482689 hasConceptScore W2092482689C111337013 @default.
- W2092482689 hasConceptScore W2092482689C113196181 @default.
- W2092482689 hasConceptScore W2092482689C121332964 @default.
- W2092482689 hasConceptScore W2092482689C145148216 @default.
- W2092482689 hasConceptScore W2092482689C149792144 @default.
- W2092482689 hasConceptScore W2092482689C151730666 @default.
- W2092482689 hasConceptScore W2092482689C159985019 @default.
- W2092482689 hasConceptScore W2092482689C171250308 @default.
- W2092482689 hasConceptScore W2092482689C178790620 @default.
- W2092482689 hasConceptScore W2092482689C185544564 @default.
- W2092482689 hasConceptScore W2092482689C185592680 @default.
- W2092482689 hasConceptScore W2092482689C19067145 @default.
- W2092482689 hasConceptScore W2092482689C192562407 @default.
- W2092482689 hasConceptScore W2092482689C22423302 @default.
- W2092482689 hasConceptScore W2092482689C2781448156 @default.
- W2092482689 hasConceptScore W2092482689C2781463530 @default.
- W2092482689 hasConceptScore W2092482689C2816523 @default.
- W2092482689 hasConceptScore W2092482689C43617362 @default.
- W2092482689 hasConceptScore W2092482689C50774322 @default.
- W2092482689 hasConceptScore W2092482689C537208039 @default.
- W2092482689 hasConceptScore W2092482689C64297162 @default.
- W2092482689 hasConceptScore W2092482689C86803240 @default.
- W2092482689 hasConceptScore W2092482689C87355193 @default.
- W2092482689 hasConceptScore W2092482689C93106096 @default.
- W2092482689 hasLocation W20924826891 @default.
- W2092482689 hasOpenAccess W2092482689 @default.
- W2092482689 hasPrimaryLocation W20924826891 @default.
- W2092482689 hasRelatedWork W1970428755 @default.
- W2092482689 hasRelatedWork W1978021736 @default.
- W2092482689 hasRelatedWork W1983472299 @default.
- W2092482689 hasRelatedWork W2025195686 @default.
- W2092482689 hasRelatedWork W2038359398 @default.
- W2092482689 hasRelatedWork W2063549331 @default.
- W2092482689 hasRelatedWork W2331503864 @default.
- W2092482689 hasRelatedWork W2375648871 @default.
- W2092482689 hasRelatedWork W2629019148 @default.
- W2092482689 hasRelatedWork W2132219547 @default.
- W2092482689 isParatext "false" @default.
- W2092482689 isRetracted "false" @default.
- W2092482689 magId "2092482689" @default.
- W2092482689 workType "article" @default.