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• W2092484329 startingPage "2726" @default.
• W2092484329 abstract "Lead zirconate titanate (PZT) thin films were fabricated on Pt/Ti/SiO 2 /Si substrates by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR-PECVD). Lead β-diketonate ( Pb(DPM) 2 , zirconium t -butoxide ( Zr(OC 4 H 9 ) 4 ) and titanium i -propoxide ( Ti(OC 3 H 7 ) 4 ) were used as metalorganic (MO) precursors. Perovskite single-phase PZT films were obtained at temperatures below 500° C when the Pb/(Zr+Ti) concentration ratio was close to 1. The cation concentrations in the PZT films were successfully controlled by adjusting the flow rate of each MO source. The variation in composition and structure with the process temperature and the MO source flow rates was discussed." @default.
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• W2092484329 date "1996-05-01" @default.
• W2092484329 modified "2023-09-27" @default.
• W2092484329 title "Composition Control of Lead Zirconate Titanate Thin Films in Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition System" @default.
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• W2092484329 doi "https://doi.org/10.1143/jjap.35.2726" @default.
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