Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092504808> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2092504808 endingPage "398" @default.
- W2092504808 startingPage "389" @default.
- W2092504808 abstract "Tin (Sn) has the advantage of delivering higher conversion efficiency compared to other fuel materials (e.g., Xe or Li) in an extreme ultraviolet (EUV) source, a necessary component for the leading next generation lithography. However, the use of a condensable fuel in a lithography system leads to some additional challenges for maintaining a satisfactory lifetime of the collector optics. A critical issue leading to decreased mirror lifetime is the buildup of debris on the surface of the primary mirror that comes from the use of Sn in either gas discharge produced plasma (GDPP) or laser produced plasma (LPP). This leads to a decreased reflectivity from the added material thickness and increased surface roughness that contributes to scattering. Inductively coupled plasma reactive ion etching with halide ions is one potential solution to this problem. This article presents results for etch rate and selectivity of Sn over SiO2 and Ru. The Sn etch rate in a chlorine plasma is found to be much higher (of the order of hundreds of nm/min) than the etch rate of other materials. A thermally evaporated Sn on Ru sample was prepared and cleaned using an inductively coupled plasma etching method. Cleaning was confirmed using several material characterization techniques. Furthermore, a collector mock-up shell was then constructed and etching was performed on Sn samples prepared in a Sn EUV source using an optimized etching recipe. The sample surface before and after cleaning was analyzed by atomic force microscopy, x-ray photoelectron spectroscopy, and Auger electron spectroscopy. The results show the dependence of etch rate on the location of Sn samples placed on the collector mock-up shell." @default.
- W2092504808 created "2016-06-24" @default.
- W2092504808 creator A5020232122 @default.
- W2092504808 creator A5029248580 @default.
- W2092504808 creator A5040614219 @default.
- W2092504808 date "2008-04-04" @default.
- W2092504808 modified "2023-09-27" @default.
- W2092504808 title "Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching" @default.
- W2092504808 cites W1972049297 @default.
- W2092504808 cites W1982218643 @default.
- W2092504808 cites W2023934381 @default.
- W2092504808 cites W2030296245 @default.
- W2092504808 cites W2071665596 @default.
- W2092504808 cites W2074011331 @default.
- W2092504808 cites W2087599743 @default.
- W2092504808 cites W2102144716 @default.
- W2092504808 cites W643454364 @default.
- W2092504808 doi "https://doi.org/10.1116/1.2899332" @default.
- W2092504808 hasPublicationYear "2008" @default.
- W2092504808 type Work @default.
- W2092504808 sameAs 2092504808 @default.
- W2092504808 citedByCount "6" @default.
- W2092504808 countsByYear W20925048082012 @default.
- W2092504808 countsByYear W20925048082014 @default.
- W2092504808 countsByYear W20925048082023 @default.
- W2092504808 crossrefType "journal-article" @default.
- W2092504808 hasAuthorship W2092504808A5020232122 @default.
- W2092504808 hasAuthorship W2092504808A5029248580 @default.
- W2092504808 hasAuthorship W2092504808A5040614219 @default.
- W2092504808 hasConcept C100460472 @default.
- W2092504808 hasConcept C107365816 @default.
- W2092504808 hasConcept C113196181 @default.
- W2092504808 hasConcept C121332964 @default.
- W2092504808 hasConcept C127413603 @default.
- W2092504808 hasConcept C130472188 @default.
- W2092504808 hasConcept C159985019 @default.
- W2092504808 hasConcept C162996421 @default.
- W2092504808 hasConcept C171250308 @default.
- W2092504808 hasConcept C175708663 @default.
- W2092504808 hasConcept C185544564 @default.
- W2092504808 hasConcept C185592680 @default.
- W2092504808 hasConcept C191897082 @default.
- W2092504808 hasConcept C192562407 @default.
- W2092504808 hasConcept C25442681 @default.
- W2092504808 hasConcept C26771246 @default.
- W2092504808 hasConcept C2779227376 @default.
- W2092504808 hasConcept C42360764 @default.
- W2092504808 hasConcept C43617362 @default.
- W2092504808 hasConcept C49040817 @default.
- W2092504808 hasConcept C525849907 @default.
- W2092504808 hasConcept C62520636 @default.
- W2092504808 hasConcept C82706917 @default.
- W2092504808 hasConcept C95974651 @default.
- W2092504808 hasConceptScore W2092504808C100460472 @default.
- W2092504808 hasConceptScore W2092504808C107365816 @default.
- W2092504808 hasConceptScore W2092504808C113196181 @default.
- W2092504808 hasConceptScore W2092504808C121332964 @default.
- W2092504808 hasConceptScore W2092504808C127413603 @default.
- W2092504808 hasConceptScore W2092504808C130472188 @default.
- W2092504808 hasConceptScore W2092504808C159985019 @default.
- W2092504808 hasConceptScore W2092504808C162996421 @default.
- W2092504808 hasConceptScore W2092504808C171250308 @default.
- W2092504808 hasConceptScore W2092504808C175708663 @default.
- W2092504808 hasConceptScore W2092504808C185544564 @default.
- W2092504808 hasConceptScore W2092504808C185592680 @default.
- W2092504808 hasConceptScore W2092504808C191897082 @default.
- W2092504808 hasConceptScore W2092504808C192562407 @default.
- W2092504808 hasConceptScore W2092504808C25442681 @default.
- W2092504808 hasConceptScore W2092504808C26771246 @default.
- W2092504808 hasConceptScore W2092504808C2779227376 @default.
- W2092504808 hasConceptScore W2092504808C42360764 @default.
- W2092504808 hasConceptScore W2092504808C43617362 @default.
- W2092504808 hasConceptScore W2092504808C49040817 @default.
- W2092504808 hasConceptScore W2092504808C525849907 @default.
- W2092504808 hasConceptScore W2092504808C62520636 @default.
- W2092504808 hasConceptScore W2092504808C82706917 @default.
- W2092504808 hasConceptScore W2092504808C95974651 @default.
- W2092504808 hasIssue "3" @default.
- W2092504808 hasLocation W20925048081 @default.
- W2092504808 hasOpenAccess W2092504808 @default.
- W2092504808 hasPrimaryLocation W20925048081 @default.
- W2092504808 hasRelatedWork W1983962185 @default.
- W2092504808 hasRelatedWork W1990208142 @default.
- W2092504808 hasRelatedWork W2002207621 @default.
- W2092504808 hasRelatedWork W2024422983 @default.
- W2092504808 hasRelatedWork W2041262082 @default.
- W2092504808 hasRelatedWork W2058735286 @default.
- W2092504808 hasRelatedWork W2064094521 @default.
- W2092504808 hasRelatedWork W2089108734 @default.
- W2092504808 hasRelatedWork W2091352732 @default.
- W2092504808 hasRelatedWork W4247851453 @default.
- W2092504808 hasVolume "26" @default.
- W2092504808 isParatext "false" @default.
- W2092504808 isRetracted "false" @default.
- W2092504808 magId "2092504808" @default.
- W2092504808 workType "article" @default.