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- W2092505845 abstract "The electromigration performance of the Al-1 per cent Si/TiN/Ti metal scheme is investigated both for contacts and for stripes and compared with the results for the standard Al-1 per cent Si metallization. Statistical extrapolations at the operating conditions for a device have been performed to calculate the useful life of contacts and stripes. The results indicate that the most severe limitation to the interconnection reliability is given by the contacts without the diffusion barrier layer." @default.
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- W2092505845 date "1991-07-01" @default.
- W2092505845 modified "2023-09-23" @default.
- W2092505845 title "The Al-1 per cent Si/TiN/Ti interconnection scheme: Electromigration and reliability extrapolations" @default.
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- W2092505845 doi "https://doi.org/10.1002/qre.4680070413" @default.
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