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- W2092615384 abstract "In order to study the particle growth processes in GeH 4 RF discharges, the spatial distribution of the absolute GeH 2 density is measured for the first time together with those of particle amount and radical production rate (Ge emission intensity) in a moderately high power range of 0.5–1.0 W/cm 2 . The particles are generated and grow around the plasma/sheath boundary near the powered electrode, and the spatial distribution of their amount is similar to those of radical production rate and GeH 2 density. Furthermore, GeH 2 density is about 10 10 cm -3 , being close to SiH 2 density in SiH 4 discharges for the similar conditions of RF power and pressure. These results indicate that GeH 2 is a highly reactive radical having a high production rate and hence is a candidate for the main contributor to the particle growth." @default.
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- W2092615384 date "1998-04-01" @default.
- W2092615384 modified "2023-09-26" @default.
- W2092615384 title "Similarities in Spatial Distributions of Absolute GeH2 Density, Radical Production Rate and Particle Amount in GeH4 RF Discharges" @default.
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- W2092615384 doi "https://doi.org/10.1143/jjap.37.l475" @default.
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