Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092788315> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2092788315 abstract "In this paper, we have investigated the linearity of the electrical linewidth measurement, and the relation to the linewidth values measured with a CD-SEM. The collected data has shown an almost constant bias between ELM and SEM values tested down to 50 nm. A comparison between poly- and α-Si lines with respect to different grain sizes was done. A further point of interest was the influence of the geometry of a line (e.g. straight vs. bent), as well as the dependence of the ELM result with regard to a changing linewidth along its length. An overview of an error analysis for the whole experimental procedure is presented." @default.
- W2092788315 created "2016-06-24" @default.
- W2092788315 creator A5008473520 @default.
- W2092788315 creator A5009510127 @default.
- W2092788315 creator A5020941441 @default.
- W2092788315 creator A5024057940 @default.
- W2092788315 creator A5053369574 @default.
- W2092788315 creator A5053842330 @default.
- W2092788315 date "2001-09-01" @default.
- W2092788315 modified "2023-10-01" @default.
- W2092788315 title "Exploring capabilities of electrical linewidth measurement (ELM) techniques" @default.
- W2092788315 cites W2070301980 @default.
- W2092788315 cites W2112204582 @default.
- W2092788315 cites W2490343118 @default.
- W2092788315 cites W2487019895 @default.
- W2092788315 doi "https://doi.org/10.1016/s0167-9317(01)00455-5" @default.
- W2092788315 hasPublicationYear "2001" @default.
- W2092788315 type Work @default.
- W2092788315 sameAs 2092788315 @default.
- W2092788315 citedByCount "1" @default.
- W2092788315 crossrefType "journal-article" @default.
- W2092788315 hasAuthorship W2092788315A5008473520 @default.
- W2092788315 hasAuthorship W2092788315A5009510127 @default.
- W2092788315 hasAuthorship W2092788315A5020941441 @default.
- W2092788315 hasAuthorship W2092788315A5024057940 @default.
- W2092788315 hasAuthorship W2092788315A5053369574 @default.
- W2092788315 hasAuthorship W2092788315A5053842330 @default.
- W2092788315 hasConcept C113196181 @default.
- W2092788315 hasConcept C120665830 @default.
- W2092788315 hasConcept C121332964 @default.
- W2092788315 hasConcept C138211643 @default.
- W2092788315 hasConcept C142181693 @default.
- W2092788315 hasConcept C159985019 @default.
- W2092788315 hasConcept C185592680 @default.
- W2092788315 hasConcept C192562407 @default.
- W2092788315 hasConcept C198352243 @default.
- W2092788315 hasConcept C2524010 @default.
- W2092788315 hasConcept C33923547 @default.
- W2092788315 hasConcept C43617362 @default.
- W2092788315 hasConcept C520434653 @default.
- W2092788315 hasConcept C62520636 @default.
- W2092788315 hasConcept C77170095 @default.
- W2092788315 hasConceptScore W2092788315C113196181 @default.
- W2092788315 hasConceptScore W2092788315C120665830 @default.
- W2092788315 hasConceptScore W2092788315C121332964 @default.
- W2092788315 hasConceptScore W2092788315C138211643 @default.
- W2092788315 hasConceptScore W2092788315C142181693 @default.
- W2092788315 hasConceptScore W2092788315C159985019 @default.
- W2092788315 hasConceptScore W2092788315C185592680 @default.
- W2092788315 hasConceptScore W2092788315C192562407 @default.
- W2092788315 hasConceptScore W2092788315C198352243 @default.
- W2092788315 hasConceptScore W2092788315C2524010 @default.
- W2092788315 hasConceptScore W2092788315C33923547 @default.
- W2092788315 hasConceptScore W2092788315C43617362 @default.
- W2092788315 hasConceptScore W2092788315C520434653 @default.
- W2092788315 hasConceptScore W2092788315C62520636 @default.
- W2092788315 hasConceptScore W2092788315C77170095 @default.
- W2092788315 hasLocation W20927883151 @default.
- W2092788315 hasOpenAccess W2092788315 @default.
- W2092788315 hasPrimaryLocation W20927883151 @default.
- W2092788315 hasRelatedWork W1581941537 @default.
- W2092788315 hasRelatedWork W1982960321 @default.
- W2092788315 hasRelatedWork W1989918144 @default.
- W2092788315 hasRelatedWork W1993010982 @default.
- W2092788315 hasRelatedWork W1993055831 @default.
- W2092788315 hasRelatedWork W1998296295 @default.
- W2092788315 hasRelatedWork W2000824120 @default.
- W2092788315 hasRelatedWork W2008586829 @default.
- W2092788315 hasRelatedWork W2016762652 @default.
- W2092788315 hasRelatedWork W2022996800 @default.
- W2092788315 hasRelatedWork W2052922921 @default.
- W2092788315 hasRelatedWork W2068184781 @default.
- W2092788315 hasRelatedWork W2113284406 @default.
- W2092788315 hasRelatedWork W2116476239 @default.
- W2092788315 hasRelatedWork W2120563157 @default.
- W2092788315 hasRelatedWork W2123132491 @default.
- W2092788315 hasRelatedWork W2331807811 @default.
- W2092788315 hasRelatedWork W2548680004 @default.
- W2092788315 hasRelatedWork W2567988659 @default.
- W2092788315 hasRelatedWork W2834433618 @default.
- W2092788315 isParatext "false" @default.
- W2092788315 isRetracted "false" @default.
- W2092788315 magId "2092788315" @default.
- W2092788315 workType "article" @default.