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- W2092817758 abstract "Preparation d'α-chloroacrylate d'halogenoalkyle polymeres; sensibilite et stabilite thermique. Etude detaillee de EBR-9 (poly α-chloroacrylate de trifluoroethyle)" @default.
- W2092817758 created "2016-06-24" @default.
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- W2092817758 date "1983-04-01" @default.
- W2092817758 modified "2023-09-24" @default.
- W2092817758 title "Highly Sensitive Positive Electron Resists Consisting of Halogenated Alkyl α‐Chloroacrylate Series Polymer Materials" @default.
- W2092817758 doi "https://doi.org/10.1149/1.2119857" @default.
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