Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092903420> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2092903420 endingPage "388" @default.
- W2092903420 startingPage "383" @default.
- W2092903420 abstract "We investigated the removal characteristics of an ultraviolet (UV) curable polymer for UV nano-imprint lithography (NIL) using atomic hydrogen, which was generated by the catalytic decomposition of H2 molecules in H2/N2 mixed gas (H2:N2=10:90vol.%) using a tungsten hot-wire catalyzer. The cured polymers were removed by atomic hydrogen without a residual layer. The removal rate of the polymer increased with rising catalyzer temperature. It was assumed that both enhanced reactivity between atomic hydrogen and polymer by the substrate temperature increase due to radiation heat of the catalyzer and increased atomic hydrogen concentration occurred as a result of the rise in catalyzer temperature. When the distance between the catalyzer and the substrate was 100mm, the catalyzer temperature was 2400°C, and the initial substrate temperature was room temperature, the removal rate of polymers was 0.17μm/min independent of exposure dose to the polymer. The removal rate of polymers was comparable to the removal rate of general i-line positive-tone novolak resist. The polymer adhering to the micro-asperity portion of the mold was removed without leaving a residual layer by grazing-incidence atomic hydrogen." @default.
- W2092903420 created "2016-06-24" @default.
- W2092903420 creator A5034012065 @default.
- W2092903420 creator A5041729199 @default.
- W2092903420 creator A5049015358 @default.
- W2092903420 creator A5071127380 @default.
- W2092903420 creator A5088771037 @default.
- W2092903420 date "2011-01-01" @default.
- W2092903420 modified "2023-09-22" @default.
- W2092903420 title "Removal of Polymer for Nano-imprint Lithography using Atomic Hydrogen Generated by the Hot-wire Catalyzer" @default.
- W2092903420 cites W2002576058 @default.
- W2092903420 cites W2005394545 @default.
- W2092903420 cites W2018061872 @default.
- W2092903420 cites W2040776998 @default.
- W2092903420 cites W2042568125 @default.
- W2092903420 cites W2062074587 @default.
- W2092903420 cites W2068978709 @default.
- W2092903420 cites W2072592325 @default.
- W2092903420 cites W2116790704 @default.
- W2092903420 cites W2135268154 @default.
- W2092903420 doi "https://doi.org/10.2494/photopolymer.24.383" @default.
- W2092903420 hasPublicationYear "2011" @default.
- W2092903420 type Work @default.
- W2092903420 sameAs 2092903420 @default.
- W2092903420 citedByCount "3" @default.
- W2092903420 countsByYear W20929034202013 @default.
- W2092903420 countsByYear W20929034202014 @default.
- W2092903420 countsByYear W20929034202015 @default.
- W2092903420 crossrefType "journal-article" @default.
- W2092903420 hasAuthorship W2092903420A5034012065 @default.
- W2092903420 hasAuthorship W2092903420A5041729199 @default.
- W2092903420 hasAuthorship W2092903420A5049015358 @default.
- W2092903420 hasAuthorship W2092903420A5071127380 @default.
- W2092903420 hasAuthorship W2092903420A5088771037 @default.
- W2092903420 hasBestOaLocation W20929034201 @default.
- W2092903420 hasConcept C111368507 @default.
- W2092903420 hasConcept C127313418 @default.
- W2092903420 hasConcept C127413603 @default.
- W2092903420 hasConcept C159985019 @default.
- W2092903420 hasConcept C178790620 @default.
- W2092903420 hasConcept C185592680 @default.
- W2092903420 hasConcept C191897082 @default.
- W2092903420 hasConcept C192562407 @default.
- W2092903420 hasConcept C2777289219 @default.
- W2092903420 hasConcept C2779227376 @default.
- W2092903420 hasConcept C42360764 @default.
- W2092903420 hasConcept C512968161 @default.
- W2092903420 hasConcept C521977710 @default.
- W2092903420 hasConcept C53524968 @default.
- W2092903420 hasConcept C542268612 @default.
- W2092903420 hasConceptScore W2092903420C111368507 @default.
- W2092903420 hasConceptScore W2092903420C127313418 @default.
- W2092903420 hasConceptScore W2092903420C127413603 @default.
- W2092903420 hasConceptScore W2092903420C159985019 @default.
- W2092903420 hasConceptScore W2092903420C178790620 @default.
- W2092903420 hasConceptScore W2092903420C185592680 @default.
- W2092903420 hasConceptScore W2092903420C191897082 @default.
- W2092903420 hasConceptScore W2092903420C192562407 @default.
- W2092903420 hasConceptScore W2092903420C2777289219 @default.
- W2092903420 hasConceptScore W2092903420C2779227376 @default.
- W2092903420 hasConceptScore W2092903420C42360764 @default.
- W2092903420 hasConceptScore W2092903420C512968161 @default.
- W2092903420 hasConceptScore W2092903420C521977710 @default.
- W2092903420 hasConceptScore W2092903420C53524968 @default.
- W2092903420 hasConceptScore W2092903420C542268612 @default.
- W2092903420 hasIssue "4" @default.
- W2092903420 hasLocation W20929034201 @default.
- W2092903420 hasOpenAccess W2092903420 @default.
- W2092903420 hasPrimaryLocation W20929034201 @default.
- W2092903420 hasRelatedWork W1869803503 @default.
- W2092903420 hasRelatedWork W2083668428 @default.
- W2092903420 hasRelatedWork W2088899554 @default.
- W2092903420 hasRelatedWork W2155632595 @default.
- W2092903420 hasRelatedWork W2276988595 @default.
- W2092903420 hasRelatedWork W2370177435 @default.
- W2092903420 hasRelatedWork W3022368423 @default.
- W2092903420 hasRelatedWork W4212776412 @default.
- W2092903420 hasRelatedWork W4230860654 @default.
- W2092903420 hasRelatedWork W4245629524 @default.
- W2092903420 hasVolume "24" @default.
- W2092903420 isParatext "false" @default.
- W2092903420 isRetracted "false" @default.
- W2092903420 magId "2092903420" @default.
- W2092903420 workType "article" @default.