Matches in SemOpenAlex for { <https://semopenalex.org/work/W2092913663> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2092913663 endingPage "237" @default.
- W2092913663 startingPage "219" @default.
- W2092913663 abstract "In this paper a general analysis of chemical vapour deposition of silicon dioxide by oxidizing silane with oxygen is presented. In Part II a mathematical model of the process was presented. The proposed model is based on the scheme of surface reactions described in Part I. The non-linear equation describing the process obtained contains unknown coefficients. In this paper these coefficients are computed by fitting the model to the experimental data. With regard to the non-linearity of the model, the Marquardt method of non-linear regression is applied for this purpose. The verification of the model comprises verification of the physical and statistical significance of computed coefficients and comparison of the experimental and computed deposition rates. It is found that very good consistence is achieved. The influences of reagent concentrations and temperature on the process kinetics are analyzed. It is established that the key parameter determining the type of control of the process kinetics is the oxygen to silane ratio." @default.
- W2092913663 created "2016-06-24" @default.
- W2092913663 creator A5014048857 @default.
- W2092913663 creator A5062277143 @default.
- W2092913663 date "1986-03-01" @default.
- W2092913663 modified "2023-10-14" @default.
- W2092913663 title "The kinetics of silicon dioxide chemical vapour deposition III: Experimental verification of the model" @default.
- W2092913663 cites W1655406381 @default.
- W2092913663 cites W1966559440 @default.
- W2092913663 cites W2039050472 @default.
- W2092913663 cites W2092414914 @default.
- W2092913663 doi "https://doi.org/10.1016/0257-8972(86)90103-9" @default.
- W2092913663 hasPublicationYear "1986" @default.
- W2092913663 type Work @default.
- W2092913663 sameAs 2092913663 @default.
- W2092913663 citedByCount "2" @default.
- W2092913663 crossrefType "journal-article" @default.
- W2092913663 hasAuthorship W2092913663A5014048857 @default.
- W2092913663 hasAuthorship W2092913663A5062277143 @default.
- W2092913663 hasConcept C111919701 @default.
- W2092913663 hasConcept C121332964 @default.
- W2092913663 hasConcept C147789679 @default.
- W2092913663 hasConcept C148898269 @default.
- W2092913663 hasConcept C151730666 @default.
- W2092913663 hasConcept C159985019 @default.
- W2092913663 hasConcept C171250308 @default.
- W2092913663 hasConcept C178790620 @default.
- W2092913663 hasConcept C185592680 @default.
- W2092913663 hasConcept C186060115 @default.
- W2092913663 hasConcept C191897082 @default.
- W2092913663 hasConcept C192562407 @default.
- W2092913663 hasConcept C2778024649 @default.
- W2092913663 hasConcept C2816523 @default.
- W2092913663 hasConcept C40875361 @default.
- W2092913663 hasConcept C41008148 @default.
- W2092913663 hasConcept C540031477 @default.
- W2092913663 hasConcept C544956773 @default.
- W2092913663 hasConcept C57410435 @default.
- W2092913663 hasConcept C62520636 @default.
- W2092913663 hasConcept C64297162 @default.
- W2092913663 hasConcept C77176794 @default.
- W2092913663 hasConcept C86803240 @default.
- W2092913663 hasConcept C97355855 @default.
- W2092913663 hasConcept C98045186 @default.
- W2092913663 hasConceptScore W2092913663C111919701 @default.
- W2092913663 hasConceptScore W2092913663C121332964 @default.
- W2092913663 hasConceptScore W2092913663C147789679 @default.
- W2092913663 hasConceptScore W2092913663C148898269 @default.
- W2092913663 hasConceptScore W2092913663C151730666 @default.
- W2092913663 hasConceptScore W2092913663C159985019 @default.
- W2092913663 hasConceptScore W2092913663C171250308 @default.
- W2092913663 hasConceptScore W2092913663C178790620 @default.
- W2092913663 hasConceptScore W2092913663C185592680 @default.
- W2092913663 hasConceptScore W2092913663C186060115 @default.
- W2092913663 hasConceptScore W2092913663C191897082 @default.
- W2092913663 hasConceptScore W2092913663C192562407 @default.
- W2092913663 hasConceptScore W2092913663C2778024649 @default.
- W2092913663 hasConceptScore W2092913663C2816523 @default.
- W2092913663 hasConceptScore W2092913663C40875361 @default.
- W2092913663 hasConceptScore W2092913663C41008148 @default.
- W2092913663 hasConceptScore W2092913663C540031477 @default.
- W2092913663 hasConceptScore W2092913663C544956773 @default.
- W2092913663 hasConceptScore W2092913663C57410435 @default.
- W2092913663 hasConceptScore W2092913663C62520636 @default.
- W2092913663 hasConceptScore W2092913663C64297162 @default.
- W2092913663 hasConceptScore W2092913663C77176794 @default.
- W2092913663 hasConceptScore W2092913663C86803240 @default.
- W2092913663 hasConceptScore W2092913663C97355855 @default.
- W2092913663 hasConceptScore W2092913663C98045186 @default.
- W2092913663 hasIssue "3" @default.
- W2092913663 hasLocation W20929136631 @default.
- W2092913663 hasOpenAccess W2092913663 @default.
- W2092913663 hasPrimaryLocation W20929136631 @default.
- W2092913663 hasRelatedWork W1591573991 @default.
- W2092913663 hasRelatedWork W1977469431 @default.
- W2092913663 hasRelatedWork W1978432934 @default.
- W2092913663 hasRelatedWork W2024871734 @default.
- W2092913663 hasRelatedWork W2046825369 @default.
- W2092913663 hasRelatedWork W2050041811 @default.
- W2092913663 hasRelatedWork W2059081369 @default.
- W2092913663 hasRelatedWork W2078183599 @default.
- W2092913663 hasRelatedWork W858177076 @default.
- W2092913663 hasRelatedWork W4301374553 @default.
- W2092913663 hasVolume "27" @default.
- W2092913663 isParatext "false" @default.
- W2092913663 isRetracted "false" @default.
- W2092913663 magId "2092913663" @default.
- W2092913663 workType "article" @default.