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- W2092934321 abstract "The depth resolution in depth-profiling of thin layers by sputtering is related to the energy and mass of the projectile, and target structure. The broadening induced by energetic ions in isotopic marker layers for different initial conditions is studied theoretically. We consider, on the one hand, the influence of the incident ion parameters: mass and energy, and, on the other, the target structure: position of the marker inside the matrix and width of the marker layer. We calculate the final depth-concentration profile for an initial30Si marker in a28Si matrix, bombarded by energetic ions, by solving a balance equation by computational methods. We observe that the broadening of the concentration profiles of the marker atoms increases with the energy of the projectiles although it remains practically constant for different ion masses, in good agreement with the experimental results. For the different initial target conditions we obtain that, although the depth resolution is not affected by the marker width, it is strongly influenced by the initial position of the marker in the matrix." @default.
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- W2092934321 date "1995-01-01" @default.
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- W2092934321 title "Depth resolution in depth profiling of marker layers by energetic ion bombardment" @default.
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- W2092934321 doi "https://doi.org/10.1016/0168-583x(94)00319-x" @default.
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