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- W2092961909 abstract "In this paper we have shown the interdependence between the sputtering external parameters (pressure, intensity, interelectrode distance) and the discharge internal parameters (electronic density and temperature, diffusion towards the walls). The axial and radial profile of the internal parameters is also modified by external parameters and essentially by the discharge gas pressure. Dans ce travail, nous avons montrél'interdépendence entre les paramètres externes de la pulvérisation cathodique (pression, intensité, distance interélectrodes) et les paramètres internes de la décharge (densité et température électroniques, diffusion vers les parois). Le profil axial et radial des paramètres internes est également modifié par les paramètres externes et essentiellement par la pression du gaz de décharge." @default.
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- W2092961909 date "1984-08-01" @default.
- W2092961909 modified "2023-09-26" @default.
- W2092961909 title "The effect of the external parameters of sputtering on the internal parameters of the discharge plasma" @default.
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- W2092961909 doi "https://doi.org/10.1016/0042-207x(84)90330-0" @default.
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