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- W2092998056 abstract "With the rapid development of Micro-Electro-Mechanical System (MEMS), it is indispensable to investigate dynamic characteristics of MEMS. Characteristics of conventional modal testing technology includes excitation of the structure via a function of known frequency characteristics using an impact hammer or an exciter, and measuring the associated response using force or motion sensors. Due to small size & ultra high frequency of MEMS, however, conventional modal testing methods cannot be directly applied to microstructures. A salient feature of modal testing of MEMS is non-contact. With application of wafer bonding, dynamic testing of MEMS on wafer level becomes very important. A base exciter for dynamic testing of MEMS on wafer level is described in this paper. The performance of the base exciter is investigated via experiments." @default.
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- W2092998056 date "2006-08-01" @default.
- W2092998056 modified "2023-09-26" @default.
- W2092998056 title "A Base Exciter for Dynamic Testing of MEMS on Wafer Level" @default.
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- W2092998056 doi "https://doi.org/10.1109/icept.2006.359769" @default.
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