Matches in SemOpenAlex for { <https://semopenalex.org/work/W20930147> ?p ?o ?g. }
- W20930147 endingPage "237" @default.
- W20930147 startingPage "162" @default.
- W20930147 abstract "The development of photonic micro-systems requires advanced and robust lithographic methods, which enable the reliable fabrication of intricate, high-quality, three-dimensional (3D) structures at high spatial resolution. In this context, the laser is presented as a versatile tool for fabrication and rapid prototyping beyond the limitations of earlier methods. Supported by the growing availability of tailored and efficient photo-sensitive materials, laser lithography builds specially designed multidimensional photonic micro- and nano-structures for emerging M(O)EMS/N(O)EMS applications. Laser-based fabrication methods for two-dimensional (2D) and 3D photonic structures and application examples are presented, whereas a special focus is put on two-photon absorption-based laser lithography, related material and technological aspects." @default.
- W20930147 created "2016-06-24" @default.
- W20930147 creator A5042036645 @default.
- W20930147 date "2012-01-01" @default.
- W20930147 modified "2023-09-23" @default.
- W20930147 title "Laser-based micro- and nano-fabrication of photonic structures" @default.
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