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- W2093076892 abstract "In the article the influence of adsorbed layer on elastic constants and surface stress are considered in MEMS and NEMS. The calculated results are shown on example of silicon resonator. Comparison between theoretical and calculated results is shown." @default.
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- W2093076892 date "2008-07-01" @default.
- W2093076892 modified "2023-09-26" @default.
- W2093076892 title "Research of surface modification on frequency properties of microresonators" @default.
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- W2093076892 doi "https://doi.org/10.1109/sibedm.2008.4585856" @default.
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