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• W2093114161 abstract "Silicon nanoporous pillar array (Si-NPA), with micro/nanometer composite structure, was prepared by hydrothermally etching single crystal silicon. Resistive humidity sensors were fabricated through evaporating coplanar interdigital aluminium electrodes on Si-NPA and the humidity sensing properties were tested. It was shown that with relative humidity changing from 11.3% to 94.6%, a resistance device response over one order of magnitude with response time less than 1 s was achieved at frequency of 1 kHz. This extraordinary property was mainly attributed to the unique morphology of Si-NPA, i.e., the regular pillar array provided an effective pathway for vapor transportation and the nanoporous structure of the pillars greatly enlarged the sensing areas." @default.
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• W2093114161 date "2009-03-01" @default.
• W2093114161 modified "2023-10-03" @default.
• W2093114161 title "Accelerated resistive humidity sensing properties of silicon nanoporous pillar array" @default.
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• W2093114161 doi "https://doi.org/10.1016/j.tsf.2008.11.071" @default.
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