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• W2093173818 endingPage "083102" @default.
• W2093173818 startingPage "083102" @default.
• W2093173818 abstract "By detecting the resonant frequency shift caused by an attached particle before and after film deposition, the Young's modulus and either mass density or thickness of a patterned thin film can be determined. Furthermore, for a film characterization, the particle mass does not need to be known and its attachment position can be either measured or calculated from consecutive resonant frequency shifts: two for bridge and three for cantilever. The applicability of mass sensors in film characterization has been confirmed by comparing predictions with recent experiments." @default.
• W2093173818 created "2016-06-24" @default.
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• W2093173818 date "2014-02-24" @default.
• W2093173818 modified "2023-09-27" @default.
• W2093173818 title "Measurement of Young's modulus and volumetric mass density/thickness of ultrathin films utilizing resonant based mass sensors" @default.
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• W2093173818 doi "https://doi.org/10.1063/1.4866417" @default.
• W2093173818 hasPublicationYear "2014" @default.
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