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- W2093175416 abstract "To achieve the high reliability and performance required by integrated circuit (IC) chips in IBM Enterprise System/9000™ processors, lithography tool centerline overlay variations between masking levels were specified at ± 0.3% µm and circuit design images were transferred with 5× step-and-repeat photolithography tools. In contrast to data obtained from 1× lithography tools, the level-to-level overlay data which characterize deviations from circuit design rules did not fit a normal distribution, and quality control was not achieved with traditional statistical procedures. A methodology was empirically developed which transformed measured data into worst-case overlay points and approximated the data by a gamma distribution. More than 80% of the worst-case distributions were fit by the gamma distribution. The transformation of chip worst-case overlay data and the quality control testing applicable to 5× step-and-repeat lithography tool processes are described in this paper." @default.
- W2093175416 created "2016-06-24" @default.
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- W2093175416 date "1992-09-01" @default.
- W2093175416 modified "2023-09-26" @default.
- W2093175416 title "A statistical approach to quality control of non-normal lithographical overlay distributions" @default.
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- W2093175416 doi "https://doi.org/10.1147/rd.365.0835" @default.
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