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- W2093188047 abstract "Based on the detailed derivation of the displacement measurement principle with Jones matrix method, the optical system of the heterodyne grating interferometry that we previously proposed was modified. A reflection phase grating with smaller grating pitch was designed with rigorous coupled-wave analysis (RCWA) to improve the measurement performance. The first order diffraction efficiency of 47.35% and 56.24% were obtained for TE and TM polarization, respectively. Therefore the TM polarization was chose to enhance the signal-to-noise ratio (SNR) of the beat signal. Meanwhile, the errors of the optical system resulting from grating non-uniformity, frequency mixing, polarization mixing and polarization-frequency mixing were discussed as well. It was shown that the frequency mixing was the main source of the errors, and the modified heterodyne grating interferometry had the potential to realize nanometer resolution for displacement measurement." @default.
- W2093188047 created "2016-06-24" @default.
- W2093188047 creator A5013925184 @default.
- W2093188047 creator A5019629478 @default.
- W2093188047 creator A5027287554 @default.
- W2093188047 creator A5030313657 @default.
- W2093188047 creator A5082935383 @default.
- W2093188047 date "2013-12-19" @default.
- W2093188047 modified "2023-09-26" @default.
- W2093188047 title "Optimized design and error analysis of optical system for heterodyne grating interferometry" @default.
- W2093188047 cites W1993095842 @default.
- W2093188047 cites W2000609275 @default.
- W2093188047 cites W2000791119 @default.
- W2093188047 cites W2002190158 @default.
- W2093188047 cites W2040853983 @default.
- W2093188047 cites W2056128652 @default.
- W2093188047 cites W2075290862 @default.
- W2093188047 cites W2075693964 @default.
- W2093188047 cites W2083926174 @default.
- W2093188047 cites W2087548109 @default.
- W2093188047 cites W2155942156 @default.
- W2093188047 doi "https://doi.org/10.1117/12.2037576" @default.
- W2093188047 hasPublicationYear "2013" @default.
- W2093188047 type Work @default.
- W2093188047 sameAs 2093188047 @default.
- W2093188047 citedByCount "2" @default.
- W2093188047 countsByYear W20931880472018 @default.
- W2093188047 countsByYear W20931880472019 @default.
- W2093188047 crossrefType "proceedings-article" @default.
- W2093188047 hasAuthorship W2093188047A5013925184 @default.
- W2093188047 hasAuthorship W2093188047A5019629478 @default.
- W2093188047 hasAuthorship W2093188047A5027287554 @default.
- W2093188047 hasAuthorship W2093188047A5030313657 @default.
- W2093188047 hasAuthorship W2093188047A5082935383 @default.
- W2093188047 hasConcept C120665830 @default.
- W2093188047 hasConcept C121332964 @default.
- W2093188047 hasConcept C126753812 @default.
- W2093188047 hasConcept C1363856 @default.
- W2093188047 hasConcept C147789679 @default.
- W2093188047 hasConcept C162151327 @default.
- W2093188047 hasConcept C166689943 @default.
- W2093188047 hasConcept C185592680 @default.
- W2093188047 hasConcept C192562407 @default.
- W2093188047 hasConcept C204003914 @default.
- W2093188047 hasConcept C205049153 @default.
- W2093188047 hasConcept C2777813233 @default.
- W2093188047 hasConcept C520434653 @default.
- W2093188047 hasConcept C52242126 @default.
- W2093188047 hasConceptScore W2093188047C120665830 @default.
- W2093188047 hasConceptScore W2093188047C121332964 @default.
- W2093188047 hasConceptScore W2093188047C126753812 @default.
- W2093188047 hasConceptScore W2093188047C1363856 @default.
- W2093188047 hasConceptScore W2093188047C147789679 @default.
- W2093188047 hasConceptScore W2093188047C162151327 @default.
- W2093188047 hasConceptScore W2093188047C166689943 @default.
- W2093188047 hasConceptScore W2093188047C185592680 @default.
- W2093188047 hasConceptScore W2093188047C192562407 @default.
- W2093188047 hasConceptScore W2093188047C204003914 @default.
- W2093188047 hasConceptScore W2093188047C205049153 @default.
- W2093188047 hasConceptScore W2093188047C2777813233 @default.
- W2093188047 hasConceptScore W2093188047C520434653 @default.
- W2093188047 hasConceptScore W2093188047C52242126 @default.
- W2093188047 hasLocation W20931880471 @default.
- W2093188047 hasOpenAccess W2093188047 @default.
- W2093188047 hasPrimaryLocation W20931880471 @default.
- W2093188047 hasRelatedWork W2005695081 @default.
- W2093188047 hasRelatedWork W2015621121 @default.
- W2093188047 hasRelatedWork W2029030475 @default.
- W2093188047 hasRelatedWork W2036299331 @default.
- W2093188047 hasRelatedWork W2060203590 @default.
- W2093188047 hasRelatedWork W2093188047 @default.
- W2093188047 hasRelatedWork W2442194584 @default.
- W2093188047 hasRelatedWork W2808384726 @default.
- W2093188047 hasRelatedWork W2981414696 @default.
- W2093188047 hasRelatedWork W3120807061 @default.
- W2093188047 isParatext "false" @default.
- W2093188047 isRetracted "false" @default.
- W2093188047 magId "2093188047" @default.
- W2093188047 workType "article" @default.