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- W2093200475 abstract "We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation." @default.
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- W2093200475 date "2012-08-01" @default.
- W2093200475 modified "2023-09-22" @default.
- W2093200475 title "Polyacrylate tunable microlens with on-chip thermopneumatic actuation" @default.
- W2093200475 cites W2099202702 @default.
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- W2093200475 doi "https://doi.org/10.1109/omems.2012.6318800" @default.
- W2093200475 hasPublicationYear "2012" @default.
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