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• W2093200612 endingPage "483" @default.
• W2093200612 startingPage "466" @default.
• W2093200612 abstract "Measurements of the plasma properties versus location, pressure and power have been made in chlorine plasmas using a compensated Langmuir probe. The locations included a plane 1 cm below the window on which the inductively coupled plasma source rests (power deposition plane) and 1 cm above the wafer electrode (wafer plane). The pressures were varied between 1 and 25 mTorr and the RF power was varied between 200 and 900 W at 13.56 MHz. Spatial profiles of the electron and positive ion densities indicate that the plasma source efficiently heated electrons where the source induced electric fields were most intense. This caused a large variation in the electron average energy (Te) both along the diameter of the power deposition plane and between the power deposition and wafer planes. Where Te was largest, ne was found to be smallest and vice versa. Spatial profiles of the electron density and Te at the wafer plane were dramatically more uniform. In addition, a comparison between polysilicon etch profiles on 150 mm wafers and plasma characteristics at the wafer plane revealed that the ion density always peaked on axis while the etch rate tended to peak at the radial edge." @default.
• W2093200612 created "2016-06-24" @default.
• W2093200612 creator A5006029597 @default.
• W2093200612 creator A5011591727 @default.
• W2093200612 date "2004-07-13" @default.
• W2093200612 modified "2023-09-24" @default.
• W2093200612 title "Chlorine plasma and polysilicon etch characterization in an inductively coupled plasma etch reactor" @default.
• W2093200612 cites W1964989868 @default.
• W2093200612 cites W1965222882 @default.
• W2093200612 cites W1966720068 @default.
• W2093200612 cites W1968087053 @default.
• W2093200612 cites W1968876084 @default.
• W2093200612 cites W1969819352 @default.
• W2093200612 cites W1980166944 @default.
• W2093200612 cites W1980234811 @default.
• W2093200612 cites W1980563574 @default.
• W2093200612 cites W1981306497 @default.
• W2093200612 cites W1986778842 @default.
• W2093200612 cites W1992529528 @default.
• W2093200612 cites W1996487032 @default.
• W2093200612 cites W2000998029 @default.
• W2093200612 cites W2003979947 @default.
• W2093200612 cites W2018278393 @default.
• W2093200612 cites W2026519374 @default.
• W2093200612 cites W2026627273 @default.
• W2093200612 cites W2026982365 @default.
• W2093200612 cites W2028679502 @default.
• W2093200612 cites W2028899483 @default.
• W2093200612 cites W2035637653 @default.
• W2093200612 cites W2036260743 @default.
• W2093200612 cites W2036711631 @default.
• W2093200612 cites W2048532798 @default.
• W2093200612 cites W2049629473 @default.
• W2093200612 cites W2058149520 @default.
• W2093200612 cites W2062398849 @default.
• W2093200612 cites W2064167001 @default.
• W2093200612 cites W2072826019 @default.
• W2093200612 cites W2074195825 @default.
• W2093200612 cites W2075848085 @default.
• W2093200612 cites W2076865388 @default.
• W2093200612 cites W2079980688 @default.
• W2093200612 cites W2080482347 @default.
• W2093200612 cites W2082976135 @default.
• W2093200612 cites W2083911121 @default.
• W2093200612 cites W2086297945 @default.
• W2093200612 cites W2089600399 @default.
• W2093200612 cites W2093750845 @default.
• W2093200612 cites W2094974064 @default.
• W2093200612 cites W2108446900 @default.
• W2093200612 cites W2140466738 @default.
• W2093200612 cites W2157188779 @default.
• W2093200612 cites W2164456184 @default.
• W2093200612 cites W2324085323 @default.
• W2093200612 cites W4255224944 @default.
• W2093200612 cites W2053127554 @default.
• W2093200612 doi "https://doi.org/10.1088/0963-0252/13/3/014" @default.
• W2093200612 hasPublicationYear "2004" @default.
• W2093200612 type Work @default.
• W2093200612 sameAs 2093200612 @default.
• W2093200612 citedByCount "17" @default.
• W2093200612 countsByYear W20932006122012 @default.
• W2093200612 countsByYear W20932006122013 @default.
• W2093200612 countsByYear W20932006122016 @default.
• W2093200612 countsByYear W20932006122017 @default.
• W2093200612 countsByYear W20932006122021 @default.
• W2093200612 countsByYear W20932006122022 @default.
• W2093200612 countsByYear W20932006122023 @default.
• W2093200612 crossrefType "journal-article" @default.
• W2093200612 hasAuthorship W2093200612A5006029597 @default.
• W2093200612 hasAuthorship W2093200612A5011591727 @default.
• W2093200612 hasConcept C113196181 @default.
• W2093200612 hasConcept C121332964 @default.
• W2093200612 hasConcept C125485243 @default.
• W2093200612 hasConcept C145148216 @default.
• W2093200612 hasConcept C151730666 @default.
• W2093200612 hasConcept C160671074 @default.
• W2093200612 hasConcept C176118016 @default.
• W2093200612 hasConcept C178790620 @default.
• W2093200612 hasConcept C184779094 @default.
• W2093200612 hasConcept C185592680 @default.
• W2093200612 hasConcept C192562407 @default.
• W2093200612 hasConcept C2816523 @default.
• W2093200612 hasConcept C43503373 @default.
• W2093200612 hasConcept C43617362 @default.
• W2093200612 hasConcept C49040817 @default.
• W2093200612 hasConcept C62520636 @default.
• W2093200612 hasConcept C64297162 @default.
• W2093200612 hasConcept C68687820 @default.
• W2093200612 hasConcept C82706917 @default.
• W2093200612 hasConcept C86803240 @default.
• W2093200612 hasConcept C95974651 @default.
• W2093200612 hasConceptScore W2093200612C113196181 @default.
• W2093200612 hasConceptScore W2093200612C121332964 @default.
• W2093200612 hasConceptScore W2093200612C125485243 @default.
• W2093200612 hasConceptScore W2093200612C145148216 @default.
• W2093200612 hasConceptScore W2093200612C151730666 @default.
• W2093200612 hasConceptScore W2093200612C160671074 @default.
• W2093200612 hasConceptScore W2093200612C176118016 @default.

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