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- W2093215747 abstract "A microprobe which supplies a beam of 2 MeV He+ ions is used to analyze surface layers on microelectronic circuits. The beam is focussed to a diameter of about 2 μm on a circuit, and the backscattered ions and characteristic X-rays are detected. Secondary electrons emitted from the sample as the beam is scanned in a raster are also used to form an image to aid in positioning the beam on particular features. The beam current can be controlled by setting the opening at the object slits, and is typically 0.1–0.5 nA for a 2 μm beam. The backscattering spectrum and X-ray spectrum are collected simultaneously with a typical collection time of 5 min. Verification of metallization thickness, incomplete metal removal during etching, and external contamination have been observed." @default.
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- W2093215747 date "1987-04-01" @default.
- W2093215747 modified "2023-09-27" @default.
- W2093215747 title "Microbeam RBS and PIXE applied to microelectronics" @default.
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- W2093215747 doi "https://doi.org/10.1016/s0168-583x(87)80213-6" @default.
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