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- W2093351070 abstract "Tremendous growth in the development of microsensors and microsystems can be seen clearly in the research activities of various laboratories and also in many countries. Progress in this field is thanks to the invention of many new measurement principles and measurement methods, the development of new sensor constructions, the development of new materials and substantially to progress in new fabrication processes and techniques. Semiconductor technology and its related techniques as well as optoelectronic technology provide opportunities for significant achievements in the development of microsensor devices and microsensor systems (microsystems). Scientific conferences dedicated to sensors and microsystems and dealing with all these subjects have made a great contribution to exchanging experience and improving knowledge in that area." @default.
- W2093351070 created "2016-06-24" @default.
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- W2093351070 date "2005-11-25" @default.
- W2093351070 modified "2023-10-18" @default.
- W2093351070 title "Optoelectronic and Electronic Sensors Conference—COE'2004" @default.
- W2093351070 doi "https://doi.org/10.1088/0957-0233/17/1/e01" @default.
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