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- W2093412675 abstract "We developed a wafer-level two-step anodic bonding process for a combined sensor with two different pressure chambers: ambient and low vacuum pressure. This two-step bonding process features: a bonding and non-bonding area controlled with a glass bump array, an anodic bonding process with plastic deformation of the glass bumps at high temperature and high loading, and two different pressure chambers formed with a sequence of bonding processes." @default.
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- W2093412675 date "2011-06-01" @default.
- W2093412675 modified "2023-10-18" @default.
- W2093412675 title "Wafer-level two-step bonding process for combined sensor with two different pressure chambers" @default.
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- W2093412675 doi "https://doi.org/10.1109/transducers.2011.5969480" @default.
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