Matches in SemOpenAlex for { <https://semopenalex.org/work/W2093441099> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2093441099 endingPage "H791" @default.
- W2093441099 startingPage "H791" @default.
- W2093441099 abstract "This paper analyzes the delamination phenomena for nonpattemed Cu/ultralow-K (ULK) wafers during abrasive-free chemical mechanical polishing (CMP) by finite element (FE) analysis. The objectives of this study are as follows: to find the major cause and major parameter of the CMP-induced delamination and to suggest better conditions to prevent the CMP-induced delamination. Through the FE analysis, we found that the maximum principal stress within the cap layer was the critical stress for the CMP-induced delamination. This means that the failure such as fracture of the cap layer incurs the CMP-induced delamination. Through the parametric study, we also found that the maximum principal stress within the cap layer is very sensitive to the modulus of the cap layer and the modulus of ULK." @default.
- W2093441099 created "2016-06-24" @default.
- W2093441099 creator A5019951975 @default.
- W2093441099 creator A5089054890 @default.
- W2093441099 date "2008-01-01" @default.
- W2093441099 modified "2023-10-15" @default.
- W2093441099 title "Analysis on Delamination Phenomena for Nonpatterned Wafers during Abrasive-Free CMP by Finite Element Simulation" @default.
- W2093441099 cites W1984435261 @default.
- W2093441099 cites W2009221461 @default.
- W2093441099 cites W2018904686 @default.
- W2093441099 cites W2041864272 @default.
- W2093441099 cites W2048531074 @default.
- W2093441099 cites W2073433607 @default.
- W2093441099 cites W2105411678 @default.
- W2093441099 cites W2161300060 @default.
- W2093441099 cites W4210305463 @default.
- W2093441099 doi "https://doi.org/10.1149/1.2963199" @default.
- W2093441099 hasPublicationYear "2008" @default.
- W2093441099 type Work @default.
- W2093441099 sameAs 2093441099 @default.
- W2093441099 citedByCount "1" @default.
- W2093441099 countsByYear W20934410992013 @default.
- W2093441099 crossrefType "journal-article" @default.
- W2093441099 hasAuthorship W2093441099A5019951975 @default.
- W2093441099 hasAuthorship W2093441099A5089054890 @default.
- W2093441099 hasConcept C127313418 @default.
- W2093441099 hasConcept C127413603 @default.
- W2093441099 hasConcept C135628077 @default.
- W2093441099 hasConcept C138113353 @default.
- W2093441099 hasConcept C151730666 @default.
- W2093441099 hasConcept C159985019 @default.
- W2093441099 hasConcept C160671074 @default.
- W2093441099 hasConcept C180088628 @default.
- W2093441099 hasConcept C191897082 @default.
- W2093441099 hasConcept C192562407 @default.
- W2093441099 hasConcept C2780957350 @default.
- W2093441099 hasConcept C30239060 @default.
- W2093441099 hasConcept C49040817 @default.
- W2093441099 hasConcept C58097730 @default.
- W2093441099 hasConcept C66938386 @default.
- W2093441099 hasConcept C77928131 @default.
- W2093441099 hasConceptScore W2093441099C127313418 @default.
- W2093441099 hasConceptScore W2093441099C127413603 @default.
- W2093441099 hasConceptScore W2093441099C135628077 @default.
- W2093441099 hasConceptScore W2093441099C138113353 @default.
- W2093441099 hasConceptScore W2093441099C151730666 @default.
- W2093441099 hasConceptScore W2093441099C159985019 @default.
- W2093441099 hasConceptScore W2093441099C160671074 @default.
- W2093441099 hasConceptScore W2093441099C180088628 @default.
- W2093441099 hasConceptScore W2093441099C191897082 @default.
- W2093441099 hasConceptScore W2093441099C192562407 @default.
- W2093441099 hasConceptScore W2093441099C2780957350 @default.
- W2093441099 hasConceptScore W2093441099C30239060 @default.
- W2093441099 hasConceptScore W2093441099C49040817 @default.
- W2093441099 hasConceptScore W2093441099C58097730 @default.
- W2093441099 hasConceptScore W2093441099C66938386 @default.
- W2093441099 hasConceptScore W2093441099C77928131 @default.
- W2093441099 hasIssue "10" @default.
- W2093441099 hasLocation W20934410991 @default.
- W2093441099 hasOpenAccess W2093441099 @default.
- W2093441099 hasPrimaryLocation W20934410991 @default.
- W2093441099 hasRelatedWork W2013921521 @default.
- W2093441099 hasRelatedWork W2071166400 @default.
- W2093441099 hasRelatedWork W2072988759 @default.
- W2093441099 hasRelatedWork W2100342067 @default.
- W2093441099 hasRelatedWork W2109659628 @default.
- W2093441099 hasRelatedWork W2276518112 @default.
- W2093441099 hasRelatedWork W2370675046 @default.
- W2093441099 hasRelatedWork W2921131276 @default.
- W2093441099 hasRelatedWork W4310180239 @default.
- W2093441099 hasRelatedWork W1968976749 @default.
- W2093441099 hasVolume "155" @default.
- W2093441099 isParatext "false" @default.
- W2093441099 isRetracted "false" @default.
- W2093441099 magId "2093441099" @default.
- W2093441099 workType "article" @default.