Matches in SemOpenAlex for { <https://semopenalex.org/work/W2093473742> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2093473742 endingPage "1011" @default.
- W2093473742 startingPage "1007" @default.
- W2093473742 abstract "In-situ phosphorus doped silicon epitaxial film with 2.8 X 1021cm-3 doping level is found to show high tensile stress comparable to carbon doped silicon with 1.8% substitutional carbon. As-grown samples show electrically activated dopant concentration of less than 2 X 1020 cm-3. The high tensile and low activation could be well explained by formation of a pseudocubic Si3P4 structure in silicon lattice. Film resistivity of 0.29 mOhm-cm could be obtained with 0.25 ms annealing at 1200 {degree sign}C, with slight reduction in tensile strain. Also, 0.23 mOhm-cm could be obtained by millisecond anneal at 1300 {degree sign}C, but with 30% reduction in tensile strain." @default.
- W2093473742 created "2016-06-24" @default.
- W2093473742 creator A5022765230 @default.
- W2093473742 creator A5040767022 @default.
- W2093473742 creator A5044899439 @default.
- W2093473742 creator A5061351550 @default.
- W2093473742 creator A5076070225 @default.
- W2093473742 date "2013-03-15" @default.
- W2093473742 modified "2023-09-27" @default.
- W2093473742 title "High Tensile Strained In-Situ Phosphorus Doped Silicon Epitaxial Film for nMOS Applications" @default.
- W2093473742 doi "https://doi.org/10.1149/05009.1007ecst" @default.
- W2093473742 hasPublicationYear "2013" @default.
- W2093473742 type Work @default.
- W2093473742 sameAs 2093473742 @default.
- W2093473742 citedByCount "19" @default.
- W2093473742 countsByYear W20934737422014 @default.
- W2093473742 countsByYear W20934737422015 @default.
- W2093473742 countsByYear W20934737422016 @default.
- W2093473742 countsByYear W20934737422017 @default.
- W2093473742 countsByYear W20934737422018 @default.
- W2093473742 countsByYear W20934737422019 @default.
- W2093473742 countsByYear W20934737422020 @default.
- W2093473742 countsByYear W20934737422022 @default.
- W2093473742 crossrefType "journal-article" @default.
- W2093473742 hasAuthorship W2093473742A5022765230 @default.
- W2093473742 hasAuthorship W2093473742A5040767022 @default.
- W2093473742 hasAuthorship W2093473742A5044899439 @default.
- W2093473742 hasAuthorship W2093473742A5061351550 @default.
- W2093473742 hasAuthorship W2093473742A5076070225 @default.
- W2093473742 hasConcept C110738630 @default.
- W2093473742 hasConcept C112950240 @default.
- W2093473742 hasConcept C119599485 @default.
- W2093473742 hasConcept C127413603 @default.
- W2093473742 hasConcept C159985019 @default.
- W2093473742 hasConcept C165801399 @default.
- W2093473742 hasConcept C172385210 @default.
- W2093473742 hasConcept C191952053 @default.
- W2093473742 hasConcept C192562407 @default.
- W2093473742 hasConcept C197162436 @default.
- W2093473742 hasConcept C2777855556 @default.
- W2093473742 hasConcept C2779227376 @default.
- W2093473742 hasConcept C49040817 @default.
- W2093473742 hasConcept C544956773 @default.
- W2093473742 hasConcept C57863236 @default.
- W2093473742 hasConcept C69990965 @default.
- W2093473742 hasConceptScore W2093473742C110738630 @default.
- W2093473742 hasConceptScore W2093473742C112950240 @default.
- W2093473742 hasConceptScore W2093473742C119599485 @default.
- W2093473742 hasConceptScore W2093473742C127413603 @default.
- W2093473742 hasConceptScore W2093473742C159985019 @default.
- W2093473742 hasConceptScore W2093473742C165801399 @default.
- W2093473742 hasConceptScore W2093473742C172385210 @default.
- W2093473742 hasConceptScore W2093473742C191952053 @default.
- W2093473742 hasConceptScore W2093473742C192562407 @default.
- W2093473742 hasConceptScore W2093473742C197162436 @default.
- W2093473742 hasConceptScore W2093473742C2777855556 @default.
- W2093473742 hasConceptScore W2093473742C2779227376 @default.
- W2093473742 hasConceptScore W2093473742C49040817 @default.
- W2093473742 hasConceptScore W2093473742C544956773 @default.
- W2093473742 hasConceptScore W2093473742C57863236 @default.
- W2093473742 hasConceptScore W2093473742C69990965 @default.
- W2093473742 hasIssue "9" @default.
- W2093473742 hasLocation W20934737421 @default.
- W2093473742 hasOpenAccess W2093473742 @default.
- W2093473742 hasPrimaryLocation W20934737421 @default.
- W2093473742 hasRelatedWork W1966205888 @default.
- W2093473742 hasRelatedWork W1995450238 @default.
- W2093473742 hasRelatedWork W2007481504 @default.
- W2093473742 hasRelatedWork W2007522409 @default.
- W2093473742 hasRelatedWork W2028994635 @default.
- W2093473742 hasRelatedWork W2089085266 @default.
- W2093473742 hasRelatedWork W2342872909 @default.
- W2093473742 hasRelatedWork W2384016035 @default.
- W2093473742 hasRelatedWork W2729932191 @default.
- W2093473742 hasRelatedWork W2795554382 @default.
- W2093473742 hasVolume "50" @default.
- W2093473742 isParatext "false" @default.
- W2093473742 isRetracted "false" @default.
- W2093473742 magId "2093473742" @default.
- W2093473742 workType "article" @default.