Matches in SemOpenAlex for { <https://semopenalex.org/work/W2093524596> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2093524596 endingPage "357" @default.
- W2093524596 startingPage "353" @default.
- W2093524596 abstract "Abstract We report a study of the formation of titanium nitride/titanium silicide multistructure layers on silicon single crystals covered with thin (140 and 400 nm) titanium films, by single step multipulse (100 to 5000) XeCl excimer laser irradiation in N 2 atmosphere at a moderate laser fluence (∼ 0.6 J/cm 2 ) and a pulse repetition rate of 50 Hz. After irradiation the samples were submitted to different investigations: optical and electron microscopy, surface resistivity, Rutherford backscattering spectrometry and nuclear reaction analysis. It is shown that the thickness of the silicide and nitride layers can be adjusted by a proper choice of the number of subsequent laser pulses. Optical spectroscopy investigations and temperature profile calculations indicate that titanium nitride is formed at the sample surface through a liquid-phase reaction." @default.
- W2093524596 created "2016-06-24" @default.
- W2093524596 creator A5000120765 @default.
- W2093524596 creator A5052008328 @default.
- W2093524596 creator A5061081703 @default.
- W2093524596 creator A5068718009 @default.
- W2093524596 creator A5082335142 @default.
- W2093524596 creator A5087898243 @default.
- W2093524596 creator A5089693331 @default.
- W2093524596 date "1992-01-01" @default.
- W2093524596 modified "2023-10-17" @default.
- W2093524596 title "Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation" @default.
- W2093524596 cites W1983329315 @default.
- W2093524596 cites W2023475277 @default.
- W2093524596 cites W2025608224 @default.
- W2093524596 cites W2026317703 @default.
- W2093524596 cites W2056373744 @default.
- W2093524596 cites W2074642450 @default.
- W2093524596 cites W2082844305 @default.
- W2093524596 cites W2091151135 @default.
- W2093524596 cites W2091545311 @default.
- W2093524596 doi "https://doi.org/10.1016/0169-4332(92)90070-e" @default.
- W2093524596 hasPublicationYear "1992" @default.
- W2093524596 type Work @default.
- W2093524596 sameAs 2093524596 @default.
- W2093524596 citedByCount "18" @default.
- W2093524596 countsByYear W20935245962014 @default.
- W2093524596 countsByYear W20935245962015 @default.
- W2093524596 countsByYear W20935245962020 @default.
- W2093524596 countsByYear W20935245962021 @default.
- W2093524596 crossrefType "journal-article" @default.
- W2093524596 hasAuthorship W2093524596A5000120765 @default.
- W2093524596 hasAuthorship W2093524596A5052008328 @default.
- W2093524596 hasAuthorship W2093524596A5061081703 @default.
- W2093524596 hasAuthorship W2093524596A5068718009 @default.
- W2093524596 hasAuthorship W2093524596A5082335142 @default.
- W2093524596 hasAuthorship W2093524596A5087898243 @default.
- W2093524596 hasAuthorship W2093524596A5089693331 @default.
- W2093524596 hasConcept C111337013 @default.
- W2093524596 hasConcept C120665830 @default.
- W2093524596 hasConcept C121332964 @default.
- W2093524596 hasConcept C127413603 @default.
- W2093524596 hasConcept C171250308 @default.
- W2093524596 hasConcept C185544564 @default.
- W2093524596 hasConcept C191897082 @default.
- W2093524596 hasConcept C192562407 @default.
- W2093524596 hasConcept C194760766 @default.
- W2093524596 hasConcept C2778489163 @default.
- W2093524596 hasConcept C2779227376 @default.
- W2093524596 hasConcept C2780477314 @default.
- W2093524596 hasConcept C2780901251 @default.
- W2093524596 hasConcept C42360764 @default.
- W2093524596 hasConcept C49040817 @default.
- W2093524596 hasConcept C506065880 @default.
- W2093524596 hasConcept C520434653 @default.
- W2093524596 hasConcept C544956773 @default.
- W2093524596 hasConceptScore W2093524596C111337013 @default.
- W2093524596 hasConceptScore W2093524596C120665830 @default.
- W2093524596 hasConceptScore W2093524596C121332964 @default.
- W2093524596 hasConceptScore W2093524596C127413603 @default.
- W2093524596 hasConceptScore W2093524596C171250308 @default.
- W2093524596 hasConceptScore W2093524596C185544564 @default.
- W2093524596 hasConceptScore W2093524596C191897082 @default.
- W2093524596 hasConceptScore W2093524596C192562407 @default.
- W2093524596 hasConceptScore W2093524596C194760766 @default.
- W2093524596 hasConceptScore W2093524596C2778489163 @default.
- W2093524596 hasConceptScore W2093524596C2779227376 @default.
- W2093524596 hasConceptScore W2093524596C2780477314 @default.
- W2093524596 hasConceptScore W2093524596C2780901251 @default.
- W2093524596 hasConceptScore W2093524596C42360764 @default.
- W2093524596 hasConceptScore W2093524596C49040817 @default.
- W2093524596 hasConceptScore W2093524596C506065880 @default.
- W2093524596 hasConceptScore W2093524596C520434653 @default.
- W2093524596 hasConceptScore W2093524596C544956773 @default.
- W2093524596 hasLocation W20935245961 @default.
- W2093524596 hasOpenAccess W2093524596 @default.
- W2093524596 hasPrimaryLocation W20935245961 @default.
- W2093524596 hasRelatedWork W1498144801 @default.
- W2093524596 hasRelatedWork W2036652791 @default.
- W2093524596 hasRelatedWork W2056373744 @default.
- W2093524596 hasRelatedWork W2056952820 @default.
- W2093524596 hasRelatedWork W2063161543 @default.
- W2093524596 hasRelatedWork W2082844305 @default.
- W2093524596 hasRelatedWork W2087924183 @default.
- W2093524596 hasRelatedWork W2093524596 @default.
- W2093524596 hasRelatedWork W2101156675 @default.
- W2093524596 hasRelatedWork W2294880307 @default.
- W2093524596 hasVolume "54" @default.
- W2093524596 isParatext "false" @default.
- W2093524596 isRetracted "false" @default.
- W2093524596 magId "2093524596" @default.
- W2093524596 workType "article" @default.