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- W2093568816 abstract "Remote plasma-assisted oxidation of SiC is a low temperature process, 300 °C, for the formation of device quality interfaces on SiC. This paper discusses two aspects of the process: (i) the motivation for eliminating high temperature oxidation processes that can generate silicon oxycarbide, Si–O–C, interfacial regions which can be a source of interfacial defects and (ii) the kinetics of the remote plasma-assisted oxidation process that effectively eliminates interfacial Si oxycarbide transition regions. The differences between interfacial relaxation at Si–SiO2 and SiC–SiO2 are based on the relative stabilities of the suboxides of Si and SiC, SiOx and (Si,C)Ox, respectively." @default.
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- W2093568816 date "2004-04-17" @default.
- W2093568816 modified "2023-09-27" @default.
- W2093568816 title "Remote plasma-assisted oxidation of SiC: a low temperature process for SiC–SiO<sub>2</sub> interface formation that eliminates interfacial Si oxycarbide transition regions" @default.
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- W2093568816 doi "https://doi.org/10.1088/0953-8984/16/17/018" @default.
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