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- W2093589095 abstract "An argon‐filled capillary discharge system with an inner diameter of 1 mm and a length of 10 mm is investigated as potential Extreme Ultraviolet (EUV) light source. The working pressure is maintained in the range of 10−4 mbar and the discharge voltage is varied in order to obtain the maximum emission of the EUV energy. The current that flows through the capillary plasma is measured by a magnetic probe while EUV radiation from the capillary discharge is detected by two sets of EUV detector, D1 and D2. Total EUV energy of the order of milli joules is obtained in the wavelength range of 11 to 18 nm from measurement using D1. However, the total energy of the 13.5 nm radiation, as deduced from the signal of D2 is only of the order of micro joules. It is also found that the total EUV energy in the wavelength of 11 to 18 nm increases with the discharge voltage, while the total energy of the EUV radiation at 13.5 nm decreases with the discharge voltage for the current setup." @default.
- W2093589095 created "2016-06-24" @default.
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- W2093589095 date "2011-01-01" @default.
- W2093589095 modified "2023-09-27" @default.
- W2093589095 title "EUV Emission of a Pulsed Capillary Discharge" @default.
- W2093589095 doi "https://doi.org/10.1063/1.3573716" @default.
- W2093589095 hasPublicationYear "2011" @default.
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