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- W2093640893 abstract "Abstract The C 2 radical density was measured in a low-pressure, radio frequency (rf), inductively coupled plasma (ICP) employing a CH 3 OH/H 2 /H 2 O mixture. Measurement was carried out under the conditions where predominantly diamond can be formed. At the typical growth conditions for the low-pressure, rf ICP reactor used for diamond formation, the C 2 radical density in the ICP region was of the order of 10 13 cm −3 . The correlation between the C 2 radical density and the quality of diamond films was investigated." @default.
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- W2093640893 date "2001-03-01" @default.
- W2093640893 modified "2023-09-23" @default.
- W2093640893 title "Detection of C2 radicals in low-pressure inductively coupled plasma source for diamond chemical vapor deposition" @default.
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- W2093640893 doi "https://doi.org/10.1016/s0925-9635(00)00420-9" @default.
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