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- W209378260 abstract "Surface composition changes in alloys sputtered with ions are very important in the field of plasma-wall interaction in the fusion reactor, thin film preparation with sputtering, surface and interface analysis with ion beam techniques and so on. Ion radiation-enhanced segregation(IRES) and ion radiation-enhanced diffusion(IRED) are very important in composition changes [1–6]. The composition change of Au-Cu thin film alloys (made by coevaporation techniques), which were sputtered with Ar, Kr and Ne ions of 2KeV (ion current density: 1–5μA/cm2), were studied so as to know the influence of IRES and IRED on preferential sputtering. Computer simulations of the sputtering process including IRES and IRED were also carried out [5,7] and applied to the thin film alloys." @default.
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- W209378260 date "1986-01-01" @default.
- W209378260 modified "2023-09-26" @default.
- W209378260 title "Sputtering of Au-Cu Thin Film Alloys" @default.
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- W209378260 doi "https://doi.org/10.1007/978-3-642-82724-2_105" @default.
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