Matches in SemOpenAlex for { <https://semopenalex.org/work/W2093821116> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2093821116 endingPage "428" @default.
- W2093821116 startingPage "425" @default.
- W2093821116 abstract "The most advanced inspection machine available today detects 250nm defects in 500nm features, which matches the demand in the production of 5:1 and 10:1 optical masks. In the near future the microelectronic industry might need 1:1 x-ray masks for the printing of feature sizes below 500nm and may use 1:1 optical masks for one micron pattern. Both types of masks require the detection of minimum defect sizes below 150nm. This paper focuses on the detection of those defects by optical sampling. Measurements of the optical signal of edge defects on a chrome-glass-wafer are presented and the limitations to enhance the signal are discussed. Based on a simple model for the optical image, the false defect signals are calculated followed by a discussion of inspection strategies in order to find out about the minimum detectable defect signal. The results suggest a resolution limit at about 100nm defect size." @default.
- W2093821116 created "2016-06-24" @default.
- W2093821116 creator A5030003187 @default.
- W2093821116 creator A5034366905 @default.
- W2093821116 creator A5050967892 @default.
- W2093821116 creator A5079482017 @default.
- W2093821116 creator A5089059104 @default.
- W2093821116 date "1989-05-01" @default.
- W2093821116 modified "2023-09-27" @default.
- W2093821116 title "Resolution limits of optical methods for the defectinspection of lithography masks" @default.
- W2093821116 cites W1993288754 @default.
- W2093821116 cites W1997889974 @default.
- W2093821116 cites W2078085827 @default.
- W2093821116 cites W2084200994 @default.
- W2093821116 cites W2134539348 @default.
- W2093821116 doi "https://doi.org/10.1016/0167-9317(89)90092-0" @default.
- W2093821116 hasPublicationYear "1989" @default.
- W2093821116 type Work @default.
- W2093821116 sameAs 2093821116 @default.
- W2093821116 citedByCount "3" @default.
- W2093821116 crossrefType "journal-article" @default.
- W2093821116 hasAuthorship W2093821116A5030003187 @default.
- W2093821116 hasAuthorship W2093821116A5034366905 @default.
- W2093821116 hasAuthorship W2093821116A5050967892 @default.
- W2093821116 hasAuthorship W2093821116A5079482017 @default.
- W2093821116 hasAuthorship W2093821116A5089059104 @default.
- W2093821116 hasConcept C120665830 @default.
- W2093821116 hasConcept C121332964 @default.
- W2093821116 hasConcept C134306372 @default.
- W2093821116 hasConcept C146617872 @default.
- W2093821116 hasConcept C151201525 @default.
- W2093821116 hasConcept C160671074 @default.
- W2093821116 hasConcept C187937830 @default.
- W2093821116 hasConcept C192562407 @default.
- W2093821116 hasConcept C199360897 @default.
- W2093821116 hasConcept C204223013 @default.
- W2093821116 hasConcept C2779843651 @default.
- W2093821116 hasConcept C33923547 @default.
- W2093821116 hasConcept C41008148 @default.
- W2093821116 hasConcept C49040817 @default.
- W2093821116 hasConceptScore W2093821116C120665830 @default.
- W2093821116 hasConceptScore W2093821116C121332964 @default.
- W2093821116 hasConceptScore W2093821116C134306372 @default.
- W2093821116 hasConceptScore W2093821116C146617872 @default.
- W2093821116 hasConceptScore W2093821116C151201525 @default.
- W2093821116 hasConceptScore W2093821116C160671074 @default.
- W2093821116 hasConceptScore W2093821116C187937830 @default.
- W2093821116 hasConceptScore W2093821116C192562407 @default.
- W2093821116 hasConceptScore W2093821116C199360897 @default.
- W2093821116 hasConceptScore W2093821116C204223013 @default.
- W2093821116 hasConceptScore W2093821116C2779843651 @default.
- W2093821116 hasConceptScore W2093821116C33923547 @default.
- W2093821116 hasConceptScore W2093821116C41008148 @default.
- W2093821116 hasConceptScore W2093821116C49040817 @default.
- W2093821116 hasIssue "1-4" @default.
- W2093821116 hasLocation W20938211161 @default.
- W2093821116 hasOpenAccess W2093821116 @default.
- W2093821116 hasPrimaryLocation W20938211161 @default.
- W2093821116 hasRelatedWork W1487466796 @default.
- W2093821116 hasRelatedWork W1650289115 @default.
- W2093821116 hasRelatedWork W1969283070 @default.
- W2093821116 hasRelatedWork W2006948021 @default.
- W2093821116 hasRelatedWork W2008622045 @default.
- W2093821116 hasRelatedWork W2008834697 @default.
- W2093821116 hasRelatedWork W2041708230 @default.
- W2093821116 hasRelatedWork W2062755887 @default.
- W2093821116 hasRelatedWork W2064024017 @default.
- W2093821116 hasRelatedWork W2076306721 @default.
- W2093821116 hasRelatedWork W2092435384 @default.
- W2093821116 hasRelatedWork W2093237552 @default.
- W2093821116 hasRelatedWork W2095022969 @default.
- W2093821116 hasRelatedWork W2302203613 @default.
- W2093821116 hasRelatedWork W2765775291 @default.
- W2093821116 hasRelatedWork W2808190567 @default.
- W2093821116 hasRelatedWork W2894908607 @default.
- W2093821116 hasRelatedWork W2977020894 @default.
- W2093821116 hasRelatedWork W2088004973 @default.
- W2093821116 hasRelatedWork W2567127417 @default.
- W2093821116 hasVolume "9" @default.
- W2093821116 isParatext "false" @default.
- W2093821116 isRetracted "false" @default.
- W2093821116 magId "2093821116" @default.
- W2093821116 workType "article" @default.