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- W2093831758 abstract "Silicon nitride (SiNx) thin films were deposited by low frequency (LF) plasma enhanced chemical vapor deposition (PECVD) technology. By systematic variation of the process parameters, e.g. reactive gas flow rate, LF power, chamber gas pressure and substrate temperature. Influences of above parameters on the intrinsic stress of SiN<sub>x</sub> films were studied and analyzed by combining with the measured refractive index (RI), density, infrared spectra results of deposited SiN<sub>x</sub> films. The results showed that intrinsic stress of SiN<sub>x</sub> film was roughly proportional to film density, which was inversely proportional to hydrogen content in the SiN<sub>x</sub> film. Substrate temperature during deposition was the most important factor affecting hydrogen content in deposited film and, accordingly, the density and intrinsic stress of SiN<sub>x</sub> film." @default.
- W2093831758 created "2016-06-24" @default.
- W2093831758 creator A5026268139 @default.
- W2093831758 creator A5037164369 @default.
- W2093831758 creator A5057296359 @default.
- W2093831758 creator A5090685358 @default.
- W2093831758 date "2010-05-13" @default.
- W2093831758 modified "2023-10-15" @default.
- W2093831758 title "Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film" @default.
- W2093831758 cites W2123123000 @default.
- W2093831758 cites W2347220601 @default.
- W2093831758 cites W589744691 @default.
- W2093831758 doi "https://doi.org/10.1117/12.867778" @default.
- W2093831758 hasPublicationYear "2010" @default.
- W2093831758 type Work @default.
- W2093831758 sameAs 2093831758 @default.
- W2093831758 citedByCount "3" @default.
- W2093831758 countsByYear W20938317582012 @default.
- W2093831758 countsByYear W20938317582021 @default.
- W2093831758 countsByYear W20938317582022 @default.
- W2093831758 crossrefType "proceedings-article" @default.
- W2093831758 hasAuthorship W2093831758A5026268139 @default.
- W2093831758 hasAuthorship W2093831758A5037164369 @default.
- W2093831758 hasAuthorship W2093831758A5057296359 @default.
- W2093831758 hasAuthorship W2093831758A5090685358 @default.
- W2093831758 hasConcept C111368507 @default.
- W2093831758 hasConcept C113196181 @default.
- W2093831758 hasConcept C127313418 @default.
- W2093831758 hasConcept C138885662 @default.
- W2093831758 hasConcept C151730666 @default.
- W2093831758 hasConcept C159985019 @default.
- W2093831758 hasConcept C171250308 @default.
- W2093831758 hasConcept C178790620 @default.
- W2093831758 hasConcept C185592680 @default.
- W2093831758 hasConcept C19067145 @default.
- W2093831758 hasConcept C192562407 @default.
- W2093831758 hasConcept C194760766 @default.
- W2093831758 hasConcept C21036866 @default.
- W2093831758 hasConcept C2777289219 @default.
- W2093831758 hasConcept C2777431650 @default.
- W2093831758 hasConcept C2779227376 @default.
- W2093831758 hasConcept C2816523 @default.
- W2093831758 hasConcept C38347018 @default.
- W2093831758 hasConcept C41895202 @default.
- W2093831758 hasConcept C43617362 @default.
- W2093831758 hasConcept C49040817 @default.
- W2093831758 hasConcept C512968161 @default.
- W2093831758 hasConcept C544956773 @default.
- W2093831758 hasConcept C57410435 @default.
- W2093831758 hasConcept C64297162 @default.
- W2093831758 hasConcept C86803240 @default.
- W2093831758 hasConceptScore W2093831758C111368507 @default.
- W2093831758 hasConceptScore W2093831758C113196181 @default.
- W2093831758 hasConceptScore W2093831758C127313418 @default.
- W2093831758 hasConceptScore W2093831758C138885662 @default.
- W2093831758 hasConceptScore W2093831758C151730666 @default.
- W2093831758 hasConceptScore W2093831758C159985019 @default.
- W2093831758 hasConceptScore W2093831758C171250308 @default.
- W2093831758 hasConceptScore W2093831758C178790620 @default.
- W2093831758 hasConceptScore W2093831758C185592680 @default.
- W2093831758 hasConceptScore W2093831758C19067145 @default.
- W2093831758 hasConceptScore W2093831758C192562407 @default.
- W2093831758 hasConceptScore W2093831758C194760766 @default.
- W2093831758 hasConceptScore W2093831758C21036866 @default.
- W2093831758 hasConceptScore W2093831758C2777289219 @default.
- W2093831758 hasConceptScore W2093831758C2777431650 @default.
- W2093831758 hasConceptScore W2093831758C2779227376 @default.
- W2093831758 hasConceptScore W2093831758C2816523 @default.
- W2093831758 hasConceptScore W2093831758C38347018 @default.
- W2093831758 hasConceptScore W2093831758C41895202 @default.
- W2093831758 hasConceptScore W2093831758C43617362 @default.
- W2093831758 hasConceptScore W2093831758C49040817 @default.
- W2093831758 hasConceptScore W2093831758C512968161 @default.
- W2093831758 hasConceptScore W2093831758C544956773 @default.
- W2093831758 hasConceptScore W2093831758C57410435 @default.
- W2093831758 hasConceptScore W2093831758C64297162 @default.
- W2093831758 hasConceptScore W2093831758C86803240 @default.
- W2093831758 hasLocation W20938317581 @default.
- W2093831758 hasOpenAccess W2093831758 @default.
- W2093831758 hasPrimaryLocation W20938317581 @default.
- W2093831758 hasRelatedWork W1974891863 @default.
- W2093831758 hasRelatedWork W1990546030 @default.
- W2093831758 hasRelatedWork W2010769555 @default.
- W2093831758 hasRelatedWork W2086235318 @default.
- W2093831758 hasRelatedWork W2120835426 @default.
- W2093831758 hasRelatedWork W2361439082 @default.
- W2093831758 hasRelatedWork W2379688728 @default.
- W2093831758 hasRelatedWork W3144697431 @default.
- W2093831758 hasRelatedWork W4206854469 @default.
- W2093831758 hasRelatedWork W2152946510 @default.
- W2093831758 isParatext "false" @default.
- W2093831758 isRetracted "false" @default.
- W2093831758 magId "2093831758" @default.
- W2093831758 workType "article" @default.