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• W2093846918 endingPage "7513" @default.
• W2093846918 startingPage "7507" @default.
• W2093846918 abstract "Etch rate equations for heavily doped n-type silicon in the absence of ion bombardment are derived from a diffusion-controlled model. The theoretical equations indicate that the etch rate for lightly doped silicon is independent of donor impurity concentration, whereas the etch rate for heavily doped silicon is increased with an increase in donor impurity concentration. Numerical calculations of the etch rate as a function of donor impurity concentration are made with some typical values of the parameters in the equations." @default.
• W2093846918 created "2016-06-24" @default.
• W2093846918 creator A5018441060 @default.
• W2093846918 creator A5053794201 @default.
• W2093846918 creator A5086836939 @default.
• W2093846918 date "1994-06-01" @default.
• W2093846918 modified "2023-10-16" @default.
• W2093846918 title "Model for the dry etching of heavily doped <i>n</i>-type silicon by atomic fluorine in the absence of ion bombardment" @default.
• W2093846918 cites W1963759736 @default.
• W2093846918 cites W1965525965 @default.
• W2093846918 cites W1968184839 @default.
• W2093846918 cites W1968590512 @default.
• W2093846918 cites W1972135184 @default.
• W2093846918 cites W1973685322 @default.
• W2093846918 cites W1978508046 @default.
• W2093846918 cites W1985035555 @default.
• W2093846918 cites W1985674465 @default.
• W2093846918 cites W1986598614 @default.
• W2093846918 cites W1996836835 @default.
• W2093846918 cites W2000310010 @default.
• W2093846918 cites W2020498371 @default.
• W2093846918 cites W2023679097 @default.
• W2093846918 cites W2029526589 @default.
• W2093846918 cites W2032809545 @default.
• W2093846918 cites W2040116395 @default.
• W2093846918 cites W2048536636 @default.
• W2093846918 cites W2057319117 @default.
• W2093846918 cites W2064528960 @default.
• W2093846918 cites W2086150893 @default.
• W2093846918 cites W2086299917 @default.
• W2093846918 cites W2088683631 @default.
• W2093846918 cites W2089117213 @default.
• W2093846918 cites W2089334184 @default.
• W2093846918 cites W2090782634 @default.
• W2093846918 cites W2090883227 @default.
• W2093846918 cites W2093448028 @default.
• W2093846918 cites W2130313070 @default.
• W2093846918 cites W2002174954 @default.
• W2093846918 doi "https://doi.org/10.1063/1.356623" @default.
• W2093846918 hasPublicationYear "1994" @default.
• W2093846918 type Work @default.
• W2093846918 sameAs 2093846918 @default.
• W2093846918 citedByCount "7" @default.
• W2093846918 crossrefType "journal-article" @default.
• W2093846918 hasAuthorship W2093846918A5018441060 @default.
• W2093846918 hasAuthorship W2093846918A5053794201 @default.
• W2093846918 hasAuthorship W2093846918A5086836939 @default.
• W2093846918 hasConcept C100460472 @default.
• W2093846918 hasConcept C111163200 @default.
• W2093846918 hasConcept C113196181 @default.
• W2093846918 hasConcept C121332964 @default.
• W2093846918 hasConcept C1291036 @default.
• W2093846918 hasConcept C145148216 @default.
• W2093846918 hasConcept C148898269 @default.
• W2093846918 hasConcept C171250308 @default.
• W2093846918 hasConcept C178790620 @default.
• W2093846918 hasConcept C179104552 @default.
• W2093846918 hasConcept C185592680 @default.
• W2093846918 hasConcept C191897082 @default.
• W2093846918 hasConcept C192562407 @default.
• W2093846918 hasConcept C2779227376 @default.
• W2093846918 hasConcept C43617362 @default.
• W2093846918 hasConcept C49040817 @default.
• W2093846918 hasConcept C506198293 @default.
• W2093846918 hasConcept C544956773 @default.
• W2093846918 hasConcept C57863236 @default.
• W2093846918 hasConcept C62520636 @default.
• W2093846918 hasConcept C69357855 @default.
• W2093846918 hasConcept C71987851 @default.
• W2093846918 hasConcept C81626474 @default.
• W2093846918 hasConcept C97355855 @default.
• W2093846918 hasConceptScore W2093846918C100460472 @default.
• W2093846918 hasConceptScore W2093846918C111163200 @default.
• W2093846918 hasConceptScore W2093846918C113196181 @default.
• W2093846918 hasConceptScore W2093846918C121332964 @default.
• W2093846918 hasConceptScore W2093846918C1291036 @default.
• W2093846918 hasConceptScore W2093846918C145148216 @default.
• W2093846918 hasConceptScore W2093846918C148898269 @default.
• W2093846918 hasConceptScore W2093846918C171250308 @default.
• W2093846918 hasConceptScore W2093846918C178790620 @default.
• W2093846918 hasConceptScore W2093846918C179104552 @default.
• W2093846918 hasConceptScore W2093846918C185592680 @default.
• W2093846918 hasConceptScore W2093846918C191897082 @default.
• W2093846918 hasConceptScore W2093846918C192562407 @default.
• W2093846918 hasConceptScore W2093846918C2779227376 @default.
• W2093846918 hasConceptScore W2093846918C43617362 @default.
• W2093846918 hasConceptScore W2093846918C49040817 @default.
• W2093846918 hasConceptScore W2093846918C506198293 @default.
• W2093846918 hasConceptScore W2093846918C544956773 @default.
• W2093846918 hasConceptScore W2093846918C57863236 @default.
• W2093846918 hasConceptScore W2093846918C62520636 @default.
• W2093846918 hasConceptScore W2093846918C69357855 @default.
• W2093846918 hasConceptScore W2093846918C71987851 @default.
• W2093846918 hasConceptScore W2093846918C81626474 @default.
• W2093846918 hasConceptScore W2093846918C97355855 @default.
• W2093846918 hasIssue "11" @default.
• W2093846918 hasLocation W20938469181 @default.
• W2093846918 hasOpenAccess W2093846918 @default.

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