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- W2093865842 endingPage "035026" @default.
- W2093865842 startingPage "035026" @default.
- W2093865842 abstract "A comparison is made between plasma parameters measured with a retarding field energy analyzer (RFEA), mounted at a grounded electrode in an inductive discharge, and a Langmuir probe located in bulk plasma close to the analyzer. Good agreement between measured plasma parameters is obtained for argon gas pressure in the range 2–10 mTorr. Parameters compared include time averaged plasma potential, the tail of the electron energy distribution function (EEDF), the electron temperature and the ion flux. This highlights the versatility of the RFEA for determining plasma parameters adjacent to the surface where probe measurements are not easily made. Combination of the probe and energy analyzer has enabled the measurement of the EEDF to a higher energy than otherwise possible." @default.
- W2093865842 created "2016-06-24" @default.
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- W2093865842 date "2008-07-31" @default.
- W2093865842 modified "2023-10-03" @default.
- W2093865842 title "Comparison of plasma parameters determined with a Langmuir probe and with a retarding field energy analyzer" @default.
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- W2093865842 doi "https://doi.org/10.1088/0963-0252/17/3/035026" @default.
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