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- W2093964512 abstract "The beneficial effects of F implantation on the modification of extended defects in Si have been studied. Preamorphized Si samples were implanted with F (75keV, 6×1015F∕cm2) and regrown by solid phase epitaxy (SPE) at 700°C. The formation, just after SPE, of a band of bubbles overlapping the F enriched region has been evidenced, clearly demonstrating the formation of F-vacancy (V) complexes with determined stoichiometry. Moreover, the authors demonstrate that these F-V complexes inhibit the formation of extended defects, acting as efficient traps for Si interstitials. These results represent a promising route toward point defects engineering in microelectronic application." @default.
- W2093964512 created "2016-06-24" @default.
- W2093964512 creator A5007792973 @default.
- W2093964512 creator A5012394754 @default.
- W2093964512 creator A5024168567 @default.
- W2093964512 creator A5041246288 @default.
- W2093964512 creator A5044460482 @default.
- W2093964512 creator A5069277399 @default.
- W2093964512 creator A5085500043 @default.
- W2093964512 date "2006-10-23" @default.
- W2093964512 modified "2023-09-25" @default.
- W2093964512 title "Evidences of F-induced nanobubbles as sink for self-interstitials in Si" @default.
- W2093964512 cites W1967159811 @default.
- W2093964512 cites W1969045541 @default.
- W2093964512 cites W1981545888 @default.
- W2093964512 cites W1982481128 @default.
- W2093964512 cites W1988557370 @default.
- W2093964512 cites W2006873669 @default.
- W2093964512 cites W2016142201 @default.
- W2093964512 cites W2019976417 @default.
- W2093964512 cites W2022476564 @default.
- W2093964512 cites W2024046647 @default.
- W2093964512 cites W2032150834 @default.
- W2093964512 cites W2032205058 @default.
- W2093964512 cites W2035443842 @default.
- W2093964512 cites W2049266835 @default.
- W2093964512 cites W2049463726 @default.
- W2093964512 cites W2055084674 @default.
- W2093964512 cites W2080224258 @default.
- W2093964512 doi "https://doi.org/10.1063/1.2364271" @default.
- W2093964512 hasPublicationYear "2006" @default.
- W2093964512 type Work @default.
- W2093964512 sameAs 2093964512 @default.
- W2093964512 citedByCount "21" @default.
- W2093964512 countsByYear W20939645122012 @default.
- W2093964512 countsByYear W20939645122013 @default.
- W2093964512 countsByYear W20939645122014 @default.
- W2093964512 countsByYear W20939645122017 @default.
- W2093964512 crossrefType "journal-article" @default.
- W2093964512 hasAuthorship W2093964512A5007792973 @default.
- W2093964512 hasAuthorship W2093964512A5012394754 @default.
- W2093964512 hasAuthorship W2093964512A5024168567 @default.
- W2093964512 hasAuthorship W2093964512A5041246288 @default.
- W2093964512 hasAuthorship W2093964512A5044460482 @default.
- W2093964512 hasAuthorship W2093964512A5069277399 @default.
- W2093964512 hasAuthorship W2093964512A5085500043 @default.
- W2093964512 hasConcept C110738630 @default.
- W2093964512 hasConcept C114221277 @default.
- W2093964512 hasConcept C144082473 @default.
- W2093964512 hasConcept C147789679 @default.
- W2093964512 hasConcept C159467904 @default.
- W2093964512 hasConcept C164675345 @default.
- W2093964512 hasConcept C171250308 @default.
- W2093964512 hasConcept C185592680 @default.
- W2093964512 hasConcept C187937830 @default.
- W2093964512 hasConcept C192562407 @default.
- W2093964512 hasConcept C2779227376 @default.
- W2093964512 hasConcept C49040817 @default.
- W2093964512 hasConcept C544956773 @default.
- W2093964512 hasConcept C8010536 @default.
- W2093964512 hasConceptScore W2093964512C110738630 @default.
- W2093964512 hasConceptScore W2093964512C114221277 @default.
- W2093964512 hasConceptScore W2093964512C144082473 @default.
- W2093964512 hasConceptScore W2093964512C147789679 @default.
- W2093964512 hasConceptScore W2093964512C159467904 @default.
- W2093964512 hasConceptScore W2093964512C164675345 @default.
- W2093964512 hasConceptScore W2093964512C171250308 @default.
- W2093964512 hasConceptScore W2093964512C185592680 @default.
- W2093964512 hasConceptScore W2093964512C187937830 @default.
- W2093964512 hasConceptScore W2093964512C192562407 @default.
- W2093964512 hasConceptScore W2093964512C2779227376 @default.
- W2093964512 hasConceptScore W2093964512C49040817 @default.
- W2093964512 hasConceptScore W2093964512C544956773 @default.
- W2093964512 hasConceptScore W2093964512C8010536 @default.
- W2093964512 hasIssue "17" @default.
- W2093964512 hasLocation W20939645121 @default.
- W2093964512 hasOpenAccess W2093964512 @default.
- W2093964512 hasPrimaryLocation W20939645121 @default.
- W2093964512 hasRelatedWork W1661303554 @default.
- W2093964512 hasRelatedWork W1971943427 @default.
- W2093964512 hasRelatedWork W1997071295 @default.
- W2093964512 hasRelatedWork W2073027129 @default.
- W2093964512 hasRelatedWork W2078140681 @default.
- W2093964512 hasRelatedWork W2131146234 @default.
- W2093964512 hasRelatedWork W2465028914 @default.
- W2093964512 hasRelatedWork W3122947772 @default.
- W2093964512 hasRelatedWork W3199889435 @default.
- W2093964512 hasRelatedWork W4372204341 @default.
- W2093964512 hasVolume "89" @default.
- W2093964512 isParatext "false" @default.
- W2093964512 isRetracted "false" @default.
- W2093964512 magId "2093964512" @default.
- W2093964512 workType "article" @default.