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- W2093979345 abstract "Li7La3Zr2O12 films were prepared on polycrystalline Al2O3 by metal organic chemical vapor deposition. The effect of deposition temperature (Tsub) on the phase formation, morphology and deposition rates was investigated. Tetragonal Li7La3Zr2O12 film formed at Tsub = 1023–1173 K. The morphology changed from small-sized granular, polygonally faceted granular to flat and smooth surface with increasing Tsub. Cubic Li7La3Zr2O12 film with fine granular surface was deposited at Tsub = 1173–1223 K. The deposition rates of the cubic and tetragonal Li7La3Zr2O12 films were approximately 20 μm h− 1, which were one to two orders of magnitude greater than those of Li7La3Zr2O12 films by pulsed laser deposition." @default.
- W2093979345 created "2016-06-24" @default.
- W2093979345 creator A5051451748 @default.
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- W2093979345 date "2015-06-01" @default.
- W2093979345 modified "2023-10-16" @default.
- W2093979345 title "Preparation of cubic and tetragonal Li7La3Zr2O12 film by metal organic chemical vapor deposition" @default.
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- W2093979345 doi "https://doi.org/10.1016/j.tsf.2014.11.094" @default.
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