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- W2094234558 abstract "A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model." @default.
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- W2094234558 title "Applications of a model for silicon resonant sensors" @default.
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- W2094234558 doi "https://doi.org/10.1016/0924-4247(94)80119-3" @default.
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