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- W2094238412 abstract "The UV excimer laser photolysis of TMA, trimethylaluminum ((CH 3 ) 3 Al) 2 , a dimer at room temperature, yields efficient generation of AlCH 3 molecules, which have been detected and identified by tunable laser mass spectroscopy for the first time. Aluminum dimers are not detected. The AlCH 3 molecules are not precursor of the Al atoms, which are also produced in high abundance. The efficient generation of a carbon containing aluminum compound 193 nm from TMA may be one important source of carbon incorporation into aluminum films formed by UV excimer laser photolysis of TMA as organometallic precursor." @default.
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- W2094238412 title "Laser Multiphoton Ionization Spectrum of AlCH<sub>3</sub> Radicals Formed by UV Excimer Laser Photolysis of Gaseous TMA at 248 nm and 193 nm" @default.
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