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- W2094272007 abstract "An analysis is given of a symmetric secondary electron extraction system suitable for use in a newly proposed immersion lens. The detailed behavior of secondary electrons in the combined electrostatic and magnetic field is presented. Numerical results show that this extraction system imposes very small effects on the primary electrons yet retains a high collection efficiency on secondary electrons, so that the advantages of the low aberration immersion lens can be fully utilized." @default.
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- W2094272007 title "Extraction of secondary electrons in a newly proposed immersion lens" @default.
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- W2094272007 doi "https://doi.org/10.1063/1.1140385" @default.
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