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- W2094302993 endingPage "6" @default.
- W2094302993 startingPage "1" @default.
- W2094302993 abstract "Radio frequency magnetron sputter deposition of Pb3MgTa2O9 (PMT) thin films on n-type (1 0 0) Si wafers is investigated in a low pressure ambient of Ar and O2. The process is optimized with process variables including rf power density, substrate temperature, ambient pressure, O2 mass flow and target composition. The properties of the films including refractive index, morphology, composition, crystallinity, microstructure and electrical properties are characterized as functions of the process parameters and correlated. The films as grown at 300°C are amorphous and become polycrystalline upon annealing at 600°C and above. The dielectric constants are between 29 and 129. The leakage current densities are below 1×10−7 A cm−2 at 1×106 V cm−1 and further improved after annealing." @default.
- W2094302993 created "2016-06-24" @default.
- W2094302993 creator A5029199630 @default.
- W2094302993 creator A5043047963 @default.
- W2094302993 date "2001-03-01" @default.
- W2094302993 modified "2023-10-09" @default.
- W2094302993 title "Preparation and properties of rf sputtered Pb(Mg1/3Ta2/3)O3 thin films" @default.
- W2094302993 cites W1538704687 @default.
- W2094302993 cites W1999774610 @default.
- W2094302993 cites W2025168520 @default.
- W2094302993 cites W2044865798 @default.
- W2094302993 doi "https://doi.org/10.1016/s0254-0584(00)00304-7" @default.
- W2094302993 hasPublicationYear "2001" @default.
- W2094302993 type Work @default.
- W2094302993 sameAs 2094302993 @default.
- W2094302993 citedByCount "4" @default.
- W2094302993 crossrefType "journal-article" @default.
- W2094302993 hasAuthorship W2094302993A5029199630 @default.
- W2094302993 hasAuthorship W2094302993A5043047963 @default.
- W2094302993 hasConcept C113196181 @default.
- W2094302993 hasConcept C123408415 @default.
- W2094302993 hasConcept C133386390 @default.
- W2094302993 hasConcept C137637335 @default.
- W2094302993 hasConcept C159985019 @default.
- W2094302993 hasConcept C160671074 @default.
- W2094302993 hasConcept C171250308 @default.
- W2094302993 hasConcept C185592680 @default.
- W2094302993 hasConcept C19067145 @default.
- W2094302993 hasConcept C191897082 @default.
- W2094302993 hasConcept C192562407 @default.
- W2094302993 hasConcept C199289684 @default.
- W2094302993 hasConcept C22423302 @default.
- W2094302993 hasConcept C2777855556 @default.
- W2094302993 hasConcept C42067758 @default.
- W2094302993 hasConcept C43617362 @default.
- W2094302993 hasConcept C46275449 @default.
- W2094302993 hasConcept C49040817 @default.
- W2094302993 hasConcept C56052488 @default.
- W2094302993 hasConcept C61427134 @default.
- W2094302993 hasConcept C8010536 @default.
- W2094302993 hasConcept C87976508 @default.
- W2094302993 hasConceptScore W2094302993C113196181 @default.
- W2094302993 hasConceptScore W2094302993C123408415 @default.
- W2094302993 hasConceptScore W2094302993C133386390 @default.
- W2094302993 hasConceptScore W2094302993C137637335 @default.
- W2094302993 hasConceptScore W2094302993C159985019 @default.
- W2094302993 hasConceptScore W2094302993C160671074 @default.
- W2094302993 hasConceptScore W2094302993C171250308 @default.
- W2094302993 hasConceptScore W2094302993C185592680 @default.
- W2094302993 hasConceptScore W2094302993C19067145 @default.
- W2094302993 hasConceptScore W2094302993C191897082 @default.
- W2094302993 hasConceptScore W2094302993C192562407 @default.
- W2094302993 hasConceptScore W2094302993C199289684 @default.
- W2094302993 hasConceptScore W2094302993C22423302 @default.
- W2094302993 hasConceptScore W2094302993C2777855556 @default.
- W2094302993 hasConceptScore W2094302993C42067758 @default.
- W2094302993 hasConceptScore W2094302993C43617362 @default.
- W2094302993 hasConceptScore W2094302993C46275449 @default.
- W2094302993 hasConceptScore W2094302993C49040817 @default.
- W2094302993 hasConceptScore W2094302993C56052488 @default.
- W2094302993 hasConceptScore W2094302993C61427134 @default.
- W2094302993 hasConceptScore W2094302993C8010536 @default.
- W2094302993 hasConceptScore W2094302993C87976508 @default.
- W2094302993 hasIssue "1-3" @default.
- W2094302993 hasLocation W20943029931 @default.
- W2094302993 hasOpenAccess W2094302993 @default.
- W2094302993 hasPrimaryLocation W20943029931 @default.
- W2094302993 hasRelatedWork W1965573061 @default.
- W2094302993 hasRelatedWork W1969786090 @default.
- W2094302993 hasRelatedWork W2009023799 @default.
- W2094302993 hasRelatedWork W2029460333 @default.
- W2094302993 hasRelatedWork W2088091229 @default.
- W2094302993 hasRelatedWork W2092364266 @default.
- W2094302993 hasRelatedWork W2944705329 @default.
- W2094302993 hasRelatedWork W3116458923 @default.
- W2094302993 hasRelatedWork W3193980021 @default.
- W2094302993 hasRelatedWork W4254148944 @default.
- W2094302993 hasVolume "69" @default.
- W2094302993 isParatext "false" @default.
- W2094302993 isRetracted "false" @default.
- W2094302993 magId "2094302993" @default.
- W2094302993 workType "article" @default.