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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094306779> ?p ?o ?g. }

• W2094306779 endingPage "2846" @default.
• W2094306779 startingPage "2842" @default.
• W2094306779 abstract "The rates of low temperature atomic oxygen-assisted oxidation of strained epitaxial Si1−xGex (x=0.05, 0.1, and 0.2) layers have been measured and compared with the rate of oxidation of pure Si. We show that in the linear regime, the oxidation rate of the SiGe layer increases with the Ge concentration in the alloy. On the other hand, Ge/Si (100) structures have been oxidized. We show that this oxidation leads to the formation of pure SiO2 oxide and that the nonoxidized Ge layer is still present at the SiO2/Si interface. The oxidation rate of Si is not affected by the presence of the pure Ge interface layer. This, together with the results of SiGe oxidation, allows us to conclude that the SiGe oxidation rate is enhanced by the presence of Ge in the SiGe alloy. This can be explained by the fact that Si–Ge bonds are weaker than the Si–Si bonds. For longer oxidation times, the oxidation kinetics of SiGe layers follow a parabolic regime. We show that the parabolic constant strongly depends of the composition of the oxide layer." @default.
• W2094306779 created "2016-06-24" @default.
• W2094306779 creator A5018367259 @default.
• W2094306779 creator A5027854289 @default.
• W2094306779 creator A5041414458 @default.
• W2094306779 creator A5057988829 @default.
• W2094306779 creator A5072990603 @default.
• W2094306779 date "1998-03-01" @default.
• W2094306779 modified "2023-09-25" @default.
• W2094306779 title "Kinetics and mechanism of low temperature atomic oxygen-assisted oxidation of SiGe layers" @default.
• W2094306779 cites W1965878366 @default.
• W2094306779 cites W1973694208 @default.
• W2094306779 cites W1976034846 @default.
• W2094306779 cites W1981248344 @default.
• W2094306779 cites W2002250716 @default.
• W2094306779 cites W2003156506 @default.
• W2094306779 cites W2003537914 @default.
• W2094306779 cites W2006847410 @default.
• W2094306779 cites W2010451022 @default.
• W2094306779 cites W2015852987 @default.
• W2094306779 cites W2018577436 @default.
• W2094306779 cites W2023509296 @default.
• W2094306779 cites W2026258903 @default.
• W2094306779 cites W2029936679 @default.
• W2094306779 cites W2058872584 @default.
• W2094306779 cites W2061695463 @default.
• W2094306779 cites W2062618825 @default.
• W2094306779 cites W2088073937 @default.
• W2094306779 cites W2089913127 @default.
• W2094306779 cites W2093914900 @default.
• W2094306779 cites W2096163198 @default.
• W2094306779 cites W2138643547 @default.
• W2094306779 cites W2142736439 @default.
• W2094306779 cites W2074271799 @default.
• W2094306779 doi "https://doi.org/10.1063/1.367045" @default.
• W2094306779 hasPublicationYear "1998" @default.
• W2094306779 type Work @default.
• W2094306779 sameAs 2094306779 @default.
• W2094306779 citedByCount "28" @default.
• W2094306779 countsByYear W20943067792013 @default.
• W2094306779 countsByYear W20943067792017 @default.
• W2094306779 countsByYear W20943067792021 @default.
• W2094306779 crossrefType "journal-article" @default.
• W2094306779 hasAuthorship W2094306779A5018367259 @default.
• W2094306779 hasAuthorship W2094306779A5027854289 @default.
• W2094306779 hasAuthorship W2094306779A5041414458 @default.
• W2094306779 hasAuthorship W2094306779A5057988829 @default.
• W2094306779 hasAuthorship W2094306779A5072990603 @default.
• W2094306779 hasConcept C110738630 @default.
• W2094306779 hasConcept C113196181 @default.
• W2094306779 hasConcept C121332964 @default.
• W2094306779 hasConcept C148898269 @default.
• W2094306779 hasConcept C171250308 @default.
• W2094306779 hasConcept C178790620 @default.
• W2094306779 hasConcept C185592680 @default.
• W2094306779 hasConcept C191897082 @default.
• W2094306779 hasConcept C192562407 @default.
• W2094306779 hasConcept C2779227376 @default.
• W2094306779 hasConcept C2779851234 @default.
• W2094306779 hasConcept C2780026712 @default.
• W2094306779 hasConcept C2983054736 @default.
• W2094306779 hasConcept C43617362 @default.
• W2094306779 hasConcept C540031477 @default.
• W2094306779 hasConcept C544956773 @default.
• W2094306779 hasConcept C62520636 @default.
• W2094306779 hasConcept C8010536 @default.
• W2094306779 hasConcept C93391505 @default.
• W2094306779 hasConceptScore W2094306779C110738630 @default.
• W2094306779 hasConceptScore W2094306779C113196181 @default.
• W2094306779 hasConceptScore W2094306779C121332964 @default.
• W2094306779 hasConceptScore W2094306779C148898269 @default.
• W2094306779 hasConceptScore W2094306779C171250308 @default.
• W2094306779 hasConceptScore W2094306779C178790620 @default.
• W2094306779 hasConceptScore W2094306779C185592680 @default.
• W2094306779 hasConceptScore W2094306779C191897082 @default.
• W2094306779 hasConceptScore W2094306779C192562407 @default.
• W2094306779 hasConceptScore W2094306779C2779227376 @default.
• W2094306779 hasConceptScore W2094306779C2779851234 @default.
• W2094306779 hasConceptScore W2094306779C2780026712 @default.
• W2094306779 hasConceptScore W2094306779C2983054736 @default.
• W2094306779 hasConceptScore W2094306779C43617362 @default.
• W2094306779 hasConceptScore W2094306779C540031477 @default.
• W2094306779 hasConceptScore W2094306779C544956773 @default.
• W2094306779 hasConceptScore W2094306779C62520636 @default.
• W2094306779 hasConceptScore W2094306779C8010536 @default.
• W2094306779 hasConceptScore W2094306779C93391505 @default.
• W2094306779 hasIssue "5" @default.
• W2094306779 hasLocation W20943067791 @default.
• W2094306779 hasOpenAccess W2094306779 @default.
• W2094306779 hasPrimaryLocation W20943067791 @default.
• W2094306779 hasRelatedWork W1982635368 @default.
• W2094306779 hasRelatedWork W1990340154 @default.
• W2094306779 hasRelatedWork W2036138130 @default.
• W2094306779 hasRelatedWork W2040676203 @default.
• W2094306779 hasRelatedWork W2047621091 @default.
• W2094306779 hasRelatedWork W2077542082 @default.
• W2094306779 hasRelatedWork W2083710899 @default.
• W2094306779 hasRelatedWork W2103117520 @default.

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