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- W2094333889 abstract "A new model for calculation of ion implantation impurity profiles in general multi-layer targets is presented. The model is based on a transformed and scaled Maxwell energy distribution function as well as on the electronic/nuclear stopping power theory. The concentration profiles of arsenic and boron ions implanted through oxide and nitride layers on silicon substrate have been calculated and compared with the experimental data." @default.
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- W2094333889 date "1989-11-01" @default.
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- W2094333889 title "A new multi-layer ion implantation model for process simulation" @default.
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- W2094333889 doi "https://doi.org/10.1016/0026-2692(89)90062-1" @default.
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