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- W2094372816 abstract "Imidized organic thin films were deposited onto glass substrates by rf magnetron sputtering of polyimide (Kapton) target. The mass spectra of sputtered species indicated that target materials were cracked into smaller molecules and the generated films on glass substrates were not identified to be polyimide but wear properties of the films were found to be rather superior to Kapton." @default.
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- W2094372816 date "2001-07-01" @default.
- W2094372816 modified "2023-09-24" @default.
- W2094372816 title "Imidized organic thin films deposited on glass substrates" @default.
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- W2094372816 doi "https://doi.org/10.1016/s0040-6090(01)01037-9" @default.
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