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• W2094394543 abstract "Sensitive nanowires: ZnO nanowire arrays are fabricated by nanoscale spacer lithography, a top-down paradigm consisting of photolithography, ZnO atomic-layer deposition, and low-damage dry etching. ZnO nanowire devices based on this technique (see picture) show good electrical transport and gas-sensing properties to various concentrations of H2 and CO." @default.
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• W2094394543 date "2008-08-01" @default.
• W2094394543 modified "2023-09-23" @default.
• W2094394543 title "Fabrication of ZnO Nanowires Using Nanoscale Spacer Lithography for Gas Sensors" @default.
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• W2094394543 doi "https://doi.org/10.1002/smll.200700922" @default.
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